Design of Micro-Cylindrical-Lens Array Used for Illumination Uniformization in Lithography Systems

2013 ◽  
Vol 40 (2) ◽  
pp. 0216001
Author(s):  
肖艳芬 Xiao Yanfen ◽  
朱菁 Zhu Jing ◽  
杨宝喜 Yang Baoxi ◽  
胡中华 Hu Zhonghua ◽  
曾爱军 Zeng Aijun ◽  
...  
Keyword(s):  
Cylindrical Lens ◽  
Lens Array

Improved uniformity of target irradiation by combining an orthogonal cylindrical lens array and the polarization control

2010 ◽  
Author(s):  
Jianzhou Zheng ◽  
Wenyang Zheng ◽  
Qingxu Yu ◽  
Bin Dong ◽  
Shouhua Guan ◽  
...  
Keyword(s):  
Cylindrical Lens ◽  
Lens Array ◽  
Polarization Control

Application of millimeter-sized polymer cylindrical lens array concentrators in solar cells

2018 ◽  
Vol 27 (5) ◽  
pp. 058801 ◽  
Author(s):  
Yao-Ju Zhang ◽  
Yi-Jie Li ◽  
Jie Lin ◽  
Chao-Long Fang ◽  
Si-Yuan Liu
Keyword(s):  
Solar Cells ◽  
Cylindrical Lens ◽  
Lens Array

Cylindrical lens array concentrator with a nanonipple-array antireflective surface for improving the performances of solar cells

2019 ◽  
Vol 439 ◽  
pp. 118-124 ◽  
Author(s):  
Yijie Li ◽  
Tao Jiang ◽  
Xin He ◽  
Yaoju Zhang ◽  
Chaolong Fang ◽  
...  
Keyword(s):  
Solar Cells ◽  
Cylindrical Lens ◽  
Lens Array

Modelling the cylindrical lens array line focus system illuminated by partially coherent light

1995 ◽  
Vol 114 (3-4) ◽  
pp. 181-188 ◽  
Author(s):  
Baida Lü ◽  
Bin Zhang ◽  
Zhongyong Liu ◽  
Bangwei Cai
Keyword(s):  
Cylindrical Lens ◽  
Coherent Light ◽  
Lens Array ◽  
Partially Coherent ◽  
Partially Coherent Light ◽  
Line Focus
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