Self-correction of phase step error in phase shifting interferometric measurement

赵智亮 ZHAO Zhi-liang; 夏伯才 XIA Bo-cai; 陈立华 CHEN Li-hua; 张志华 ZHANG Zhi-hua; 郑万国 ZHENG Wan-guo

doi:10.3788/ope.20132105.1116

Self-correction of phase step error in phase shifting interferometric measurement

Optics and Precision Engineering ◽

10.3788/ope.20132105.1116 ◽

2013 ◽

Vol 21 (5) ◽

pp. 1116-1121

Author(s):

赵智亮 ZHAO Zhi-liang ◽

夏伯才 XIA Bo-cai ◽

陈立华 CHEN Li-hua ◽

张志华 ZHANG Zhi-hua ◽

郑万国 ZHENG Wan-guo

Keyword(s):

Phase Shifting ◽

Phase Step ◽

Interferometric Measurement

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Phase-step retrieval for tunable phase-shifting algorithms

Optics Communications ◽

10.1016/j.optcom.2017.08.045 ◽

2017 ◽

Vol 405 ◽

pp. 334-342 ◽

Cited By ~ 3

Author(s):

Gastón A. Ayubi ◽

Ignacio Duarte ◽

César D. Perciante ◽

Jorge L. Flores ◽

José A. Ferrari

Keyword(s):

Phase Shifting ◽

Phase Step

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Design of a phase-shifting algorithm for interferometric measurement of optical thickness variation

Photonic Instrumentation Engineering VII ◽

10.1117/12.2554163 ◽

2020 ◽

Author(s):

Wonjun Bae ◽

Yangjin Kim

Keyword(s):

Optical Thickness ◽

Phase Shifting ◽

Thickness Variation ◽

Interferometric Measurement

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Tunable phase shifting algorithm insensitive to phase-step miscalibration

Interferometry XX ◽

10.1117/12.2568764 ◽

2020 ◽

Author(s):

Gastón A. Ayubi

Keyword(s):

Phase Shifting ◽

Phase Step

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Modeling interferometric measurement error of small radius parts with a phase-shifting Fizeau using the y-y bar diagram

Optical Design and Fabrication 2019 (Freeform, OFT) ◽

10.1364/oft.2019.om2a.2 ◽

2019 ◽

Author(s):

Reem Alsalamah ◽

Patrick J. Reardon

Keyword(s):

Measurement Error ◽

Phase Shifting ◽

Small Radius ◽

Interferometric Measurement

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Phase-step insensitive algorithms for phase-shifting interferometry

Measurement Science and Technology ◽

10.1088/0957-0233/5/6/003 ◽

1994 ◽

Vol 5 (6) ◽

pp. 648-654 ◽

Cited By ~ 63

Author(s):

C T Farrell ◽

M A Player

Keyword(s):

Phase Shifting ◽

Phase Step ◽

Phase Shifting Interferometry

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Comparison of some phase-shifting algorithms with a phase step of Π/2

10.1117/12.447358 ◽

2001 ◽

Cited By ~ 3

Author(s):

Kemao Qian

Keyword(s):

Phase Shifting ◽

Phase Step

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Real-time phase-step estimation in phase-shifting interferometry

Optical Engineering ◽

10.1117/1.2715444 ◽

2007 ◽

Vol 46 (3) ◽

pp. 035601 ◽

Cited By ~ 2

Author(s):

Rajesh Langoju

Keyword(s):

Real Time ◽

Phase Shifting ◽

Phase Step ◽

Phase Shifting Interferometry

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Fast and accurate wavefront reconstruction in two-frame phase-shifting interferometry with unknown phase step

Optics Letters ◽

10.1364/ol.43.003033 ◽

2018 ◽

Vol 43 (13) ◽

pp. 3033 ◽

Cited By ~ 11

Author(s):

Zhongtao Cheng ◽

Dong Liu

Keyword(s):

Phase Shifting ◽

Phase Step ◽

Wavefront Reconstruction ◽

Phase Shifting Interferometry ◽

Unknown Phase

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Accurate nonlinear phase step estimation in phase shifting interferometry

Optics Communications ◽

10.1016/j.optcom.2006.05.059 ◽

2006 ◽

Vol 266 (2) ◽

pp. 638-647 ◽

Cited By ~ 1

Author(s):

Rajesh Langoju ◽

Abhijit Patil ◽

Pramod Rastogi

Keyword(s):

Phase Shifting ◽

Phase Step ◽

Phase Shifting Interferometry ◽

Nonlinear Phase

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Phase-step retrieval for phase-shifting algorithms by ellipse fitting

Latin America Optics and Photonics Conference ◽

10.1364/laop.2018.tu4a.25 ◽

2018 ◽

Author(s):

Gastón A. Ayubi

Keyword(s):

Phase Shifting ◽

Ellipse Fitting ◽

Phase Step

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