Atomic Layer Processing
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TOTAL DOCUMENTS

12

(FIVE YEARS 12)

H-INDEX

0

(FIVE YEARS 0)

Published By Wiley

9783527824199

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Front Matter

Atomic Layer Processing ◽

10.1002/9783527824199.fmatter ◽

2021 ◽

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Fundamentals

Atomic Layer Processing ◽

10.1002/9783527824199.ch2 ◽

2021 ◽

pp. 7-42

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Thermal Isotropic ALE

Atomic Layer Processing ◽

10.1002/9783527824199.ch4 ◽

2021 ◽

pp. 51-83

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Reactive Ion Etching

Atomic Layer Processing ◽

10.1002/9783527824199.ch7 ◽

2021 ◽

pp. 133-224

Keyword(s):

Reactive Ion Etching ◽

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Directional ALE

Atomic Layer Processing ◽

10.1002/9783527824199.ch6 ◽

2021 ◽

pp. 91-132

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Emerging Etching Technologies

Atomic Layer Processing ◽

10.1002/9783527824199.ch10 ◽

2021 ◽

pp. 271-276

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Ion Beam Etching

Atomic Layer Processing ◽

10.1002/9783527824199.ch8 ◽

2021 ◽

pp. 225-229

Keyword(s):

Ion Beam ◽

Ion Beam Etching

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Introduction

Atomic Layer Processing ◽

10.1002/9783527824199.ch1 ◽

2021 ◽

pp. 1-5

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Radical Etching

Atomic Layer Processing ◽

10.1002/9783527824199.ch5 ◽

2021 ◽

pp. 85-89

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Etching Species Generation

Atomic Layer Processing ◽

10.1002/9783527824199.ch9 ◽

2021 ◽

pp. 231-269

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