Optical Measurement of Surface Topography
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Published By Springer Berlin Heidelberg

9783642120114, 9783642120121

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Focus Variation Instruments

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_7 ◽

2011 ◽

pp. 131-166 ◽

Author(s):

Franz Helmli

Keyword(s):

Focus Variation

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Some Common Terms and Definitions

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_2 ◽

2011 ◽

pp. 15-22 ◽

Author(s):

Richard Leach

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Introduction to Surface Texture Measurement

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_1 ◽

2011 ◽

pp. 1-14 ◽

Author(s):

Richard Leach

Keyword(s):

Surface Texture ◽

Texture Measurement

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Point Autofocus Instruments

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_6 ◽

2011 ◽

pp. 107-129 ◽

Author(s):

Katsuhiro Miura ◽

Atsuko Nose

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Calibration of Optical Surface Topography Measuring Instruments

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_4 ◽

2011 ◽

pp. 49-70 ◽

Author(s):

Richard Leach ◽

Claudiu Giusca

Keyword(s):

Surface Topography ◽

Measuring Instruments ◽

Optical Surface

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Chromatic Confocal Microscopy

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_5 ◽

2011 ◽

pp. 71-106 ◽

Author(s):

François Blateyron

Keyword(s):

Confocal Microscopy

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Light Scattering Methods

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_12 ◽

2011 ◽

pp. 287-318 ◽

Author(s):

Theodore V. Vorburger ◽

Richard Silver ◽

Rainer Brodmann ◽

Boris Brodmann ◽

Jörg Seewig

Keyword(s):

Light Scattering

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Imaging Confocal Microscopy

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_11 ◽

2011 ◽

pp. 237-286 ◽

Author(s):

Roger Artigas

Keyword(s):

Confocal Microscopy

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Digital Holographic Microscopy

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_10 ◽

2011 ◽

pp. 209-235 ◽

Author(s):

Tristan Colomb ◽

Jonas Kühn

Keyword(s):

Digital Holographic Microscopy ◽

Holographic Microscopy

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Phase Shifting Interferometry

Optical Measurement of Surface Topography ◽

10.1007/978-3-642-12012-1_8 ◽

2011 ◽

pp. 167-186 ◽

Author(s):

Peter de Groot

Keyword(s):

Phase Shifting ◽

Phase Shifting Interferometry

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