Developments in Surface Contamination and Cleaning, Volume 9
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Index

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00017-3 ◽

2017 ◽

pp. 191-196

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Contamination Removal From UV and EUV Photomasks

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00005-7 ◽

2017 ◽

pp. 135-173

Author(s):

R. Prasanna Venkatesh ◽

Min-Su Kim ◽

Jin-Goo Park

Keyword(s):

Contamination Removal

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Aqueous Displacement of Water-Immiscible Cleaning Solvents

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00006-9 ◽

2017 ◽

pp. 175-189

Author(s):

Sami B. Awad

Keyword(s):

Cleaning Solvents

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Gas-Phase Cleaning for Removal of Surface Contaminants

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00002-1 ◽

2017 ◽

pp. 27-82 ◽

Author(s):

Rajiv Kohli

Keyword(s):

Gas Phase ◽

Surface Contaminants

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Preface

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00010-0 ◽

2017 ◽

pp. xiii-xv ◽

Author(s):

Rajiv Kohli ◽

Kash Mittal

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Brush Scrubbing for Post-CMP Cleaning

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00004-5 ◽

2017 ◽

pp. 109-133

Author(s):

Ting Sun ◽

Zhenxing Han ◽

Manish Keswani

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About the Editors

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00011-2 ◽

2017 ◽

pp. xi-xii

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List of Contributors

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00012-4 ◽

2017 ◽

pp. ix

Author(s):

Sami B. Awad ◽

Zhenxing Han ◽

Takeshi Hattori ◽

Manish Keswani ◽

Dongsik Kim ◽

...

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Front-matter

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00007-0 ◽

2017 ◽

pp. i-iii

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Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures

Developments in Surface Contamination and Cleaning, Volume 9 ◽

10.1016/b978-0-323-43157-6.00001-x ◽

2017 ◽

pp. 1-25 ◽

Author(s):

Takeshi Hattori

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