Investigation into the Role of Cold Atmospheric Plasma on the Precision Grinding of RB-SiC Ceramic at Room Temperature

RB-SiC ceramic is one of the most important and useful material as optical precision elements in many scientific research fields. In this paper, a novel cold atmospheric plasma (CAP), which is based on the precision grinding process in surface technology to modify at room temperature (RT) for grinding with a combination of plasma oxidation surface modification is proposed. To identify the performance of the proposed cold atmospheric plasma (CAP) method on the surface modification of RB-SiC ceramic, precision grinding test was conducted. To reveal the fundamental issue in the grinding of RB-SiC ceramic, numerical calculation and model analysis were conducted to investigate the effect of the composite process on grinding forces and the mechanism of subsurface material removal in the presence of plasma oxidation. As a result of the method included the kept constant during the precision grinding of the composite process self-adaption-grinding process to avoid the deviation caused by second grinding particle entry. As a summary, we provides a significant cold atmospheric plasma-precision grinding compound process toward the establishment of the basic theory by analyzing the mechanism of the simulated design and computation. The process and technical difficulties of RB-SiC ceramic and mechanism of subsurface material removal during precision grinding were be solved.

Study on the Algorithm of Three-Dimensional Surface Residual Material Height of Nano-ZrO2 Ceramics under Ultra-Precision Grinding

A large number of studies have shown that the height of a residual material is the key factor affecting the surface quality of ultra-precision grinding. However, the grinding process contains several random factors, such as the randomness of grinding particle size and the random distribution of grinding particles, which cause the complexity of the material removal process. In this study, taking the Nano-ZrO2 as an example, the removal process of surface materials in ultra-precision grinding of hard and brittle materials was analyzed by probability. A new calculation method for the height of surface residual materials in ultra-precision grinding of Nano-ZrO2 was proposed, and the prediction model of the three-dimensional roughness Sa and Sq were established by using this calculation method. The simulation and experimental results show that this calculation method can obtain the more accurate surface residual material height value which accords with the characteristics of three-dimensional roughness sampling, which provides a theoretical reference for the analysis of the material removal process and the surface quality evaluation of ultra-precision grinding of hard and brittle materials.

Experimental Study on the Reliability and the Precision-maintenance of the Ultra-precision Grinding Machine Based on the Key Subsystem Platforms

The development of high-reliability, high-precision large-scale CNC ultra-precision grinding machines is essential for the efficient processing and manufacturing of large-diameter optical components. In this paper, we studied the reliability and the precision-maintenance of the ultra-precision grinding machine tool experimentally. First, the subsystems with poor performance was identified based on former operating data, which turned out to be the hydrostatic spindle subsystem and the feed subsystem. Then, we set up specific experimental platforms for these two subsystems in order to study the thermal deformation and thermal characteristics. The temperature difference between the inflow and outflow oils of the hydrostatic systems is used as the key parameter to model the accuracy evolution. Our results may provide a method to reveal the relationship between the thermal characteristics and the operating parameters of the subsystems, an therefore compensate the thermal error of the whole ultra-precision grinding machine.