Near-Surface Investigation by Backscattering of N+Ions and Grazing Angle Beam Incidence

1976 ◽  
pp. 211-221 ◽  
Author(s):  
W. Pabst
2017 ◽  
Author(s):  
Min Li ◽  
Miaoyu Chen ◽  
Wei Liu ◽  
Meng Zhang ◽  
Jiangli Chen ◽  
...  

2021 ◽  
Author(s):  
M. Papadopoulou ◽  
C. Colombero ◽  
M. Staring ◽  
J. Singer ◽  
R. Eddies ◽  
...  

2016 ◽  
Author(s):  
Rui Diao ◽  
Guo-Chen Wu ◽  
Xin-Min Shang ◽  
Yong-Jun Rui ◽  
Qing-Hui Cui

1986 ◽  
Vol 90 ◽  
Author(s):  
T.-M. Kao ◽  
T. W. Sigmon

ABSTRACTIn this work, we report the use of Rutherford backscattering(RBS) measurements and computer simulations to provide accurate stoichiometry information and semi-quantitative defect densities for the near surface region of Hg1−xCdxTe (MCT). The accuracy of the Hg1−xCdx Te x-values determined by our method is found to be comparable to other commonly used methods, such as FTIR or the electron microprobe. The data obtained as structural defects from RBS channeling measurements are in basic agreement with other techniques, such as chemical etching. The sensitivity of the channeling measurement to uniformly distributed dislocations is found to be about 107−108 cm−2, however, for dislocations forming subgrains, the detectable level of dislocation comes to 105 – 106 cm−2. The depth profiles of lattice disorder resulting from ion implantation into MCT are also extracted from RBS channeling measurements using these simulation programs. These profiles are found to closely match the calculated profiles for the displaced atoms calculated using an implantation modeling program (TRIM). We also report on the use of channeling-in-grazing-angle-out technique for evaluating the stoichiometry of the first few monolayers of the MCT surface.


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