AbstractThe primary X-ray analyzer is used for nondestructive spectrochemical analysis of solid specimens. Accelerated electron beams bombard the specimen surface directly and generate primary X-rays which are measured in a vacuum spectrometer. The method of primary X-ray spectroscopy is superior to the fluorescence X-ray spectroscopy because (1) detectable sensitivity for such light elements as magnesium and aluminum is very high, and (2) the correction of the measured value for self-absorption of X-rays by the specimen itself is low. The performance of the instrument and applications are reported.