Long Pulse Excimer Laser Doping of Silicon and Silicon Carbide for High Precision Junction Fabrication

2006 ◽  
pp. 375-409
Author(s):  
E. Fogarassy ◽  
J. Venturini
Keyword(s):  
Silicon Carbide ◽  
Excimer Laser ◽  
High Precision ◽  
Laser Doping ◽  
Pulse Excimer Laser ◽  
Long Pulse

scholarly journals Single-Grain Si TFTs Fabricated by Liquid-Si and Long-Pulse Excimer-Laser

2013 ◽  
Vol 50 (8) ◽  
pp. 49-53 ◽  
Author(s):  
R. Ishihara ◽  
J. Zhang ◽  
M. Trifunovic ◽  
M. van der Zwan ◽  
H. Takagishi ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Pulse Excimer Laser ◽  
Single Grain ◽  
Long Pulse

Enhanced Energy Transport via Quartz Fibers Using 250 ns Long-Pulse Excimer Laser

1988 ◽  
pp. 101-103
Author(s):  
U. Sowada ◽  
H.-J. Kahlert ◽  
W. Mückenheim ◽  
D. Basting
Keyword(s):  
Excimer Laser ◽  
Energy Transport ◽  
Pulse Excimer Laser ◽  
Long Pulse

Amorphous silicon crystallization by a long-pulse excimer laser

2001 ◽  
Author(s):  
Paolo Di Lazzaro ◽  
Sarah Bollanti ◽  
Francesca Bonfigli ◽  
Francesco Flora ◽  
Gualtiero Giordano ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Excimer Laser ◽  
Pulse Excimer Laser ◽  
Long Pulse

Shadowgraphic imaging of material removal during laser drilling with a long pulse excimer laser

2005 ◽  
Vol 80 (4) ◽  
pp. 769-775 ◽  
Author(s):  
A. Schoonderbeek ◽  
C.A. Biesheuvel ◽  
R.M. Hofstra ◽  
K.-J. Boller ◽  
J. Meijer
Keyword(s):  
Excimer Laser ◽  
Material Removal ◽  
Laser Drilling ◽  
Pulse Excimer Laser ◽  
Long Pulse

Shadowgraphic imaging of metal drilling with a long pulse excimer laser

2003 ◽  
Author(s):  
Aart Schoonderbeek ◽  
Cornelis A. Biesheuvel ◽  
Ramon M. Hofstra ◽  
Klaus-Jochen Boller ◽  
Johan Meijer
Keyword(s):  
Excimer Laser ◽  
Pulse Excimer Laser ◽  
Long Pulse

The development of a long-pulse excimer laser system

2005 ◽  
Author(s):  
Valery F. Losev ◽  
Boris M. Koval'chuk ◽  
Viktor F. Tarasenko ◽  
Yury N. Panchenko ◽  
Nikolai G. Ivanov ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Laser System ◽  
Pulse Excimer Laser ◽  
Long Pulse

scholarly journals Fiberoptic Delivery and Vaporization Using a Long Pulse Excimer Laser

1991 ◽  
Vol 12 (2) ◽  
pp. 3-10
Author(s):  
Hitoshi OGINO ◽  
Hitoshi OKABAYASHI ◽  
Toshihumi OKAMOTO ◽  
Toshihiko BAN
Keyword(s):  
Excimer Laser ◽  
Pulse Excimer Laser ◽  
Long Pulse

High repetition rate operation of a long pulse excimer laser

1994 ◽  
Vol 64 (6) ◽  
pp. 679-680 ◽  
Author(s):  
Yukio Sato ◽  
Mitsuo Inoue ◽  
Kenyu Haruta ◽  
Haruhiko Nagai ◽  
Yutaka Murai
Keyword(s):  
Excimer Laser ◽  
Repetition Rate ◽  
High Repetition Rate ◽  
High Repetition ◽  
Pulse Excimer Laser ◽  
Long Pulse

Low-divergence operation of a long-pulse excimer laser using a SBS phase-conjugate cavity

1989 ◽  
Vol 48 (4) ◽  
pp. 351-356 ◽  
Author(s):  
M. R. Osborne ◽  
W. A. Schroeder ◽  
M. J. Damzen ◽  
M. H. R. Hutchinson
Keyword(s):  
Excimer Laser ◽  
Phase Conjugate ◽  
Pulse Excimer Laser ◽  
Long Pulse
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