scholarly journals Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements

Author(s):  
N.F. Morozov ◽  
D.A. Indeitsev ◽  
V.S. Igumnova ◽  
A.V. Lukin ◽  
I.A. Popov ◽  
...  
1995 ◽  
Vol 50 (2) ◽  
pp. 107-108 ◽  
Author(s):  
Michael F. Halasz

2010 ◽  
Author(s):  
Patrice Renaud ◽  
Mathieu Goyette ◽  
Simon Zhornicki ◽  
Dominique Trottier ◽  
Joanne-L. Rouleau ◽  
...  
Keyword(s):  

2008 ◽  
Author(s):  
J. Navarro ◽  
C. Arrieta ◽  
L. Ceja
Keyword(s):  

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