Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements
N.F. Morozov
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D.A. Indeitsev
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V.S. Igumnova
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A.V. Lukin
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I.A. Popov
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...
1995 ◽
Vol 50
(2)
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pp. 107-108
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Marco Sara
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Francesca Pistoia
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Paolo Onorati
Patrice Renaud
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Mathieu Goyette
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Simon Zhornicki
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Dominique Trottier
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Joanne-L. Rouleau
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...
J. Navarro
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C. Arrieta
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L. Ceja
Stephen J. Guastello
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Henry Boeh
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Mark Lynn
Lynn Adams
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Nathanael Adams