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Influence of sputtering pressure on the properties of hydrogenated amorphous‐silicon carbon alloy films prepared by magnetron sputtering of silicon in methane‐argon gas mixtures
Journal of Applied Physics
◽
10.1063/1.336995
◽
1986
◽
Vol 59
(7)
◽
pp. 2498-2502
◽
Cited By ~ 16
Author(s):
Nobuo Saito
Keyword(s):
Magnetron Sputtering
◽
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Gas Mixtures
◽
Argon Gas
◽
Alloy Films
◽
Silicon Carbon
◽
Sputtering Pressure
◽
Hydrogenated Amorphous
Download Full-text
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Cited By
References
Influence of rf power on the properties of hydrogenated amorphous silicon carbon alloy films prepared by magnetron sputtering of silicon in methane‐argon gas mixtures
Journal of Applied Physics
◽
10.1063/1.335775
◽
1985
◽
Vol 58
(9)
◽
pp. 3504-3507
◽
Cited By ~ 29
Author(s):
Nobuo Saito
Keyword(s):
Magnetron Sputtering
◽
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Gas Mixtures
◽
Rf Power
◽
Argon Gas
◽
Alloy Films
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
Electron spin resonance of hydrogenated amorphous silicon-carbon alloy films prepared by magnetron sputtering
Philosophical Magazine Letters
◽
10.1080/09500838708203764
◽
1987
◽
Vol 56
(4)
◽
pp. 161-163
◽
Cited By ~ 1
Author(s):
Takato Nakamura
◽
Nobuo Saito
◽
Yoshiko Suzuki
◽
Yoichiro Nakanishi
◽
Goro Shimaoka
Keyword(s):
Electron Spin Resonance
◽
Magnetron Sputtering
◽
Amorphous Silicon
◽
Electron Spin
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Spin Resonance
◽
Hydrogenated Amorphous
Download Full-text
Doping effects of aluminium on the properties of hydrogenated amorphous silicon–carbon alloy films prepared by magnetron sputtering
Philosophical Magazine B
◽
10.1080/13642819008215250
◽
1990
◽
Vol 62
(5)
◽
pp. 527-536
◽
Cited By ~ 11
Author(s):
N. Saito
◽
Y. Tomioka
◽
H. Senda
◽
T. Yamaguchi
◽
K. Kawamura
Keyword(s):
Magnetron Sputtering
◽
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Doping Effects
◽
Hydrogenated Amorphous
Download Full-text
Effect of hydrogen on the properties of magnetron sputtering of hydrogenated amorphous silicon carbon alloy films
Journal of Applied Physics
◽
10.1063/1.337844
◽
1987
◽
Vol 61
(8)
◽
pp. 2962-2965
◽
Cited By ~ 7
Author(s):
Nobuo Saito
Keyword(s):
Magnetron Sputtering
◽
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
Highly photoconductive and photosensitive hydrogenated amorphous silicon carbon alloy films prepared by magnetron sputtering
Applied Physics Letters
◽
10.1063/1.95853
◽
1985
◽
Vol 46
(1)
◽
pp. 61-63
◽
Cited By ~ 19
Author(s):
Nobuo Saito
Keyword(s):
Magnetron Sputtering
◽
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
Defects in hydrogenated amorphous silicon‐carbon alloy films prepared by glow discharge decomposition and sputtering
Journal of Applied Physics
◽
10.1063/1.329879
◽
1982
◽
Vol 53
(11)
◽
pp. 7299-7305
◽
Cited By ~ 132
Author(s):
A. Morimoto
◽
T. Miura
◽
M. Kumeda
◽
T. Shimizu
Keyword(s):
Glow Discharge
◽
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
The effect of carbon on the density of states of hydrogenated amorphous silicon-carbon alloy films prepared from silane and propane
Journal of Non-Crystalline Solids
◽
10.1016/0022-3093(89)90022-7
◽
1989
◽
Vol 113
(2-3)
◽
pp. 282-286
◽
Cited By ~ 1
Author(s):
K. Ibrahim
◽
J.I.B. Wilson
◽
A. Qayyum
◽
A.E. Henderson
◽
A.G. Fitzgerald
Keyword(s):
Amorphous Silicon
◽
Density Of States
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
Thermal modification of wide-bandgap hydrogenated amorphous silicon-carbon alloy films grown by plasma-enhanced chemical vapour deposition from C2H2+SiH4 mixtures
Philosophical Magazine B
◽
10.1080/13642819708202333
◽
1997
◽
Vol 75
(4)
◽
pp. 485-496
◽
Cited By ~ 6
Author(s):
Yichun Liu
◽
F. Giorgis
◽
C. F. Pirri
Keyword(s):
Amorphous Silicon
◽
Chemical Vapour Deposition
◽
Vapour Deposition
◽
Hydrogenated Amorphous Silicon
◽
Chemical Vapour
◽
Wide Bandgap
◽
Thermal Modification
◽
Alloy Films
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
Thermally induced metastable defects in hydrogenated amorphous silicon and silicon-carbon alloy films
Physical Review B
◽
10.1103/physrevb.38.8371
◽
1988
◽
Vol 38
(12)
◽
pp. 8371-8376
◽
Cited By ~ 34
Author(s):
Xixiang Xu
◽
Akihisa Okumura
◽
Akiharu Morimoto
◽
Minoru Kumeda
◽
Tatsuo Shimizu
Keyword(s):
Amorphous Silicon
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Thermally Induced
◽
Silicon Carbon
◽
Hydrogenated Amorphous
Download Full-text
Quantum well model and variation of the optical band gap in hydrogenated amorphous silicon carbon alloy films
Solid State Communications
◽
10.1016/s0038-1098(01)00161-2
◽
2001
◽
Vol 118
(10)
◽
pp. 535-539
◽
Cited By ~ 6
Author(s):
D.K Basa
Keyword(s):
Quantum Well
◽
Amorphous Silicon
◽
Band Gap
◽
Optical Band Gap
◽
Hydrogenated Amorphous Silicon
◽
Alloy Films
◽
Silicon Carbon
◽
Well Model
◽
Hydrogenated Amorphous
Download Full-text
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