Monte Carlo calculations on the influence of attachment on the thermalization of secondary electrons in an electron‐beam‐sustained discharge

1987 ◽  
Vol 61 (1) ◽  
pp. 120-125 ◽  
Author(s):  
G. Schaefer ◽  
G. F. Reinking ◽  
K. H. Schoenbach
Keyword(s):  
Monte Carlo ◽  
Electron Beam ◽  
Secondary Electrons ◽  
Monte Carlo Calculations ◽  
Sustained Discharge

The effect of scattering foil parameters on electron-beam Monte Carlo calculations

2001 ◽  
Vol 28 (12) ◽  
pp. 2527-2534 ◽  
Author(s):  
Michael R. Bieda ◽  
John A. Antolak ◽  
Kenneth R. Hogstrom
Keyword(s):  
Monte Carlo ◽  
Electron Beam ◽  
Monte Carlo Calculations

Measurements of the range of secondary electrons in low-Z materials

1984 ◽  
Vol 42 ◽  
pp. 356-357
Author(s):  
A. Muray ◽  
M. Isaacson ◽  
E. Kirkland
Keyword(s):  
Monte Carlo ◽  
Sample Surface ◽  
Mean Free Path ◽  
Simple Analytical Model ◽  
Si Substrate ◽  
Secondary Electrons ◽  
Monte Carlo Calculations ◽  
Escape Depth ◽  
Small Probe ◽  
Pattern Size

Previously, calculations of the resolution of SEM secondary electron images due to the escape depth of these electrons utilized Monte-Carlo calculations to simulate the “edge brightness effects” seen in high resolution magnification images obtained with small probe sizes (e.g.,). Similar Monte-Carlo calculations have been made to try to deduce the energy dissipation profiles in PMMA due to secondary electrons. We are trying to develop a simple analytical model which might allow us to get a better feel for the salient features with which the secondary electrons limit the pattern size in microfabrication and spatial resolution in the SEM.For our initial measurements, we have fabricated the structure shown in figure 1. The thickness of both the PMMA and Si substrate are less than one mean free path for inelastic scattering (of 100 keV electrons) thick. A 10 Å diameter beam of convergence angle of 15 mrad is incident normal to the sample surface.

Monte Carlo calculations of electron beam output factors for a medical linear accelerator

1998 ◽  
Vol 43 (12) ◽  
pp. 3479-3494 ◽  
Author(s):  
Ajay Kapur ◽  
C-M Ma ◽  
Ed C Mok ◽  
David O Findley ◽  
Arthur L Boyer
Keyword(s):  
Monte Carlo ◽  
Electron Beam ◽  
Linear Accelerator ◽  
Monte Carlo Calculations ◽  
Medical Linear Accelerator ◽  
Beam Output ◽  
Output Factors

Monte Carlo calculations of correction factors for plastic phantoms in clinical photon and electron beam dosimetry

2009 ◽  
Vol 36 (7) ◽  
pp. 2992-3001 ◽  
Author(s):  
Fujio Araki ◽  
Yuji Hanyu ◽  
Miyoko Fukuoka ◽  
Kenji Matsumoto ◽  
Masahiko Okumura ◽  
...  
Keyword(s):  
Monte Carlo ◽  
Electron Beam ◽  
Correction Factors ◽  
Monte Carlo Calculations ◽  
Beam Dosimetry

Monte Carlo simulations of the ion-cascade process in the ESEM

1996 ◽  
Vol 54 ◽  
pp. 834-835
Author(s):  
B.L. Thiel ◽  
I.C. Bache ◽  
A.L. Fletcher ◽  
P. Meredith ◽  
A.M. Donald
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Simulations ◽  
Cascade Process ◽  
Secondary Electrons ◽  
Monte Carlo Calculations ◽  
Steady State Kinetic ◽  
Electron Cascade ◽  
State Kinetic ◽  
Primary Electrons ◽  
Environmental Sem

Our Monte Carlo simulations and experimental measurements show the Townsend Gas Capacitor (TGC) model to be highly inappropriate for describing the electron cascade process in the Environmental SEM (ESEM). Previous workers have described the signal collected by the Gaseous Secondary Electron Detector (GSED) as having contributions from secondary as well as backscattered and primary electrons, all being amplified by gas cascade. Although these models are qualitatively correct, they require a more sophisticated description of Townsend’s First Ionisation Coefficient, α. Figure 1 illustrates the short-comings of the TGC models when compared to experimentally obtained amplification curves. (Details of the amplification measurements made with various imaging gases will be given elsewhere, along with specifics of the Monte Carlo Calculations.)The major flaw in applying the TGC model to the ESEM stems from the assumption that the secondary electrons and their environmental daughters reach a steady-state kinetic energy distribution en-route to the detector.

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