Modeling and simulation of physical sputtering
2016 ◽
Vol 627
(1)
◽
pp. 183-189
Keyword(s):
2021 ◽
Vol 33
(2)
◽
pp. 04020443
2011 ◽
Vol 3
(7)
◽
pp. 453-454
Keyword(s):
2012 ◽
Vol 3
(7)
◽
pp. 151-153
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