Deep subwavelength photolithography based on surface plasmon polariton resonance with metallic grating waveguide heterostructure
Keyword(s):
2010 ◽
Vol 87
(5-8)
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pp. 1297-1299
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Keyword(s):
2017 ◽
Vol 34
(9)
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pp. 1937
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2010 ◽
Vol 19
(04)
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pp. 571-581
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2010 ◽
Keyword(s):
2010 ◽
2009 ◽
Vol 27
(24)
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pp. 5675-5680
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