High repetition and high average power solid-state laser for EUV lithography

2009 ◽  
Author(s):  
H. Fujita ◽  
K. Tsubakimoto ◽  
H. Yoshida ◽  
R. Bhushan ◽  
N. Miyanaga ◽  
...  
Keyword(s):  
Solid State ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser ◽  
High Repetition ◽  
Euv Lithography

High Average Power and High Repetition Solid State Laser for EUV Lithography

2007 ◽  
Author(s):  
Hisanori Fujita ◽  
Masahiro Nakatsuka ◽  
Ravi Bhushan ◽  
Kouji Tsubakimoto ◽  
Hidetsugu Yoshida ◽  
...  
Keyword(s):  
Solid State ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser ◽  
High Repetition ◽  
Euv Lithography

scholarly journals Overview of the HiLASE project: high average power pulsed DPSSL systems for research and industry

2014 ◽  
Vol 2 ◽  
Author(s):  
M. Divoky ◽  
M. Smrz ◽  
M. Chyla ◽  
P. Sikocinski ◽  
P. Severova ◽  
...  
Keyword(s):  
Solid State ◽  
Repetition Rate ◽  
Average Power ◽  
Pulsed Laser ◽  
Solid State Laser ◽  
High Repetition Rate ◽  
High Average Power ◽  
State Laser ◽  
High Repetition ◽  
Diode Pumped

Abstract An overview of the Czech national R&D project HiLASE (High average power pulsed laser) is presented. The project focuses on the development of advanced high repetition rate, diode pumped solid state laser (DPSSL) systems with energies in the range from mJ to 100 J and repetition rates in the range from 10 Hz to 100 kHz. Some applications of these lasers in research and hi-tech industry are also presented.

High Average Power Laser Diode Pumped Solid-State Laser

2009 ◽  
Vol 36 (7) ◽  
pp. 1605-1618 ◽  
Author(s):  
周寿桓 Zhou Shouhuan ◽  
赵鸿 Zhao Hong ◽  
唐小军 Tang Xiaojun
Keyword(s):  
Solid State ◽  
Laser Diode ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
Power Laser ◽  
State Laser ◽  
Diode Pumped

High average power diode pumped solid state laser

2017 ◽  
Vol 14 (3) ◽  
pp. 035803 ◽  
Author(s):  
Yue Gao ◽  
Yanjie Wang ◽  
Amy Chan ◽  
Murray Dawson ◽  
Ben Greene
Keyword(s):  
Solid State ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser ◽  
Diode Pumped ◽  
Power Diode

The LUCIA project: a high average power ytterbium diode pumped solid state laser chain

2004 ◽  
Author(s):  
Gilbert L. Bourdet ◽  
Jean-Christophe Chanteloup ◽  
A. Fulop ◽  
Y. Julien ◽  
Arnold Migus
Keyword(s):  
Solid State ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser ◽  
Diode Pumped

High Average Power Solid State Laser Developments At Lawrence Livermore National Laboratory

1986 ◽  
Author(s):  
M. A. Summers ◽  
J. B. Trenholme ◽  
W. L. Gagnon ◽  
R. J. Gelinas ◽  
S. E. Stokowski ◽  
...  
Keyword(s):  
Solid State ◽  
Lawrence Livermore National Laboratory ◽  
National Laboratory ◽  
Average Power ◽  
Solid State Laser ◽  
High Average Power ◽  
State Laser

scholarly journals Development of High-Peak and High-Average-Power LD Pumped Solid-State Laser System for EUV Generation

2006 ◽  
Vol 34 (9) ◽  
pp. 628-632 ◽  
Author(s):  
Koji TSUBAKIMOTO ◽  
Hidetsugu YOSHIDA ◽  
Hisanori FUJITA ◽  
Masahiro NAKATSUKA
Keyword(s):  
Solid State ◽  
Laser System ◽  
Average Power ◽  
Solid State Laser ◽  
High Peak ◽  
High Average Power ◽  
State Laser
Sign in / Sign up

Export Citation Format

Share Document