Phase shifting interferometer for the characterization of nanodevices

2002 ◽  
Author(s):  
P. Boher ◽  
J.P. Piel ◽  
J.L. Stehle ◽  
A. Dubois ◽  
A.C. Boccara
Keyword(s):  
Phase Shifting

Electrical Dimension Characterization of Binary and Alternating Aperture Phase-Shifting Masks

2002 ◽  
Author(s):  
Martin McCallum ◽  
Stewart Smith ◽  
Alan Lissimore ◽  
Anthony J. Walton ◽  
J. Tom M. Stevenson
Keyword(s):  
Phase Shifting

Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry

1997 ◽  
Author(s):  
Kenneth A. Goldberg ◽  
Edita Tejnil ◽  
Sang Hun Lee ◽  
Hector Medecki ◽  
David T. Attwood, Jr. ◽  
...  
Keyword(s):  
Phase Shifting

Surface form characterization of plane-parallel elements using frequency-tuned phase-shifting interferometry

2020 ◽  
Author(s):  
Jan Kredba ◽  
Marek Stašík ◽  
Marek Mach ◽  
Ondřej Matoušek ◽  
Vasyl Karabyn
Keyword(s):  
Phase Shifting ◽  
Surface Form ◽  
Plane Parallel ◽  
Phase Shifting Interferometry

scholarly journals Characterization of a bimorph deformable mirror using stroboscopic phase-shifting interferometry

2007 ◽  
Vol 134 (1) ◽  
pp. 221-230 ◽  
Author(s):  
David A. Horsley ◽  
Hyunkyu Park ◽  
Sophie P. Laut ◽  
John S. Werner
Keyword(s):  
Phase Shifting ◽  
Deformable Mirror ◽  
Phase Shifting Interferometry

Static characterization of microstructures using AOMSI and temporal phase-shifting (TPS) methods

2012 ◽  
Vol 18 (5) ◽  
pp. 661-666
Author(s):  
Davoud Jahani ◽  
Sivakumar Narayanswamy ◽  
Muthukumaran Packirisamy ◽  
Murali Manohohar Pai
Keyword(s):  
Phase Shifting ◽  
Temporal Phase
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