Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
2020 ◽
Vol 29
(4)
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pp. 612-612
1999 ◽
2002 ◽
2008 ◽
Vol 17
(5)
◽
pp. 1283-1283
2018 ◽
Vol 138
(6)
◽
pp. NL6_1-NL6_1
2005 ◽
Vol 14
(5)
◽
pp. 1208-1208