Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
Latest Publications

TOTAL DOCUMENTS

150

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

0780359984

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

A micro ER valve fabricated by micromachining

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906580 ◽

2002 ◽

Cited By ~ 2

Author(s):

K. Yoshida ◽

M. Kikuchi ◽

Jung-Ho Park ◽

S. Yokota

Download Full-text

Fabrication of microprobe array with sub-100 nm nano-heater for nanometric thermal imaging and data storage

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906514 ◽

2002 ◽

Author(s):

Dong-Ween Lee ◽

T. Ono ◽

T. Abe ◽

M. Esashi

Keyword(s):

Data Storage ◽

Thermal Imaging

Download Full-text

Novel applications of thermally controlled microbubble driving system

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906534 ◽

2002 ◽

Cited By ~ 3

Author(s):

K. Takahashi ◽

K. Yoshino ◽

S. Hatano ◽

K. Nagayama ◽

T. Asano

Keyword(s):

Driving System ◽

Novel Applications

Download Full-text

A centrally-clamped parallel-beam bistable MEMS mechanism

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906551 ◽

2002 ◽

Cited By ~ 12

Author(s):

J. Qiu ◽

J.H. Lang ◽

A.H. Slocum

Keyword(s):

Parallel Beam

Download Full-text

Flexible microelectrode arrays with integrated insertion devices

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906517 ◽

2002 ◽

Cited By ~ 8

Author(s):

D.P. O'Brien ◽

T.R. Nichols ◽

M.G. Allen

Keyword(s):

Microelectrode Arrays

Download Full-text

Applications of MEMS to industrial inspection

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906510 ◽

2002 ◽

Cited By ~ 12

Author(s):

M. Takeda

Keyword(s):

Industrial Inspection

Download Full-text

A monolithic inkjet print head: DomeJet

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906592 ◽

2002 ◽

Cited By ~ 4

Author(s):

Sang-Wook Lee ◽

Hyeon-Cheol Kim ◽

Keon Kuk ◽

Yong-Soo Oh

Keyword(s):

Print Head

Download Full-text

Performance of a MEMS based micro capillary pumped loop for chip-level temperature control

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906569 ◽

2002 ◽

Cited By ~ 7

Author(s):

K. Pettigrew ◽

J. Kirshberg ◽

K. Yerkes ◽

D. Trebotich ◽

D. Liepmann

Keyword(s):

Temperature Control ◽

Capillary Pumped Loop

Download Full-text

Photoresist as a sacrificial layer by dissolution in acetone

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906492 ◽

2002 ◽

Cited By ~ 6

Author(s):

K. Walsh ◽

J. Norville ◽

Yu-Chong Tai

Keyword(s):

Sacrificial Layer

Download Full-text

An electrostatic induction micromotor supported on gas-lubricated bearings

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) ◽

10.1109/memsys.2001.906535 ◽

2002 ◽

Cited By ~ 4

Author(s):

L.G. Frechette ◽

S.F. Nagle ◽

R. Ghodssi ◽

S.D. Umans ◽

M.A. Schmidt ◽

...

Keyword(s):

Electrostatic Induction

Download Full-text

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

A micro ER valve fabricated by micromachining

Fabrication of microprobe array with sub-100 nm nano-heater for nanometric thermal imaging and data storage

Novel applications of thermally controlled microbubble driving system

A centrally-clamped parallel-beam bistable MEMS mechanism

Flexible microelectrode arrays with integrated insertion devices

Applications of MEMS to industrial inspection

A monolithic inkjet print head: DomeJet

Performance of a MEMS based micro capillary pumped loop for chip-level temperature control

Photoresist as a sacrificial layer by dissolution in acetone

An electrostatic induction micromotor supported on gas-lubricated bearings

Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
Latest Publications