17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest
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Nano-to-micro self-assembly using shear flow devices

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290612 ◽

2004 ◽

Author(s):

Chi-Yuan Shih ◽

Siyang Zheng ◽

E. Meng ◽

Yu-Chong Tai ◽

Yi Liu ◽

...

Keyword(s):

Self Assembly ◽

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An AFM-based device for in-situ characterization of nano-wear

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290552 ◽

2004 ◽

Author(s):

S. Deladi ◽

J.W. Berenschot ◽

M.J. de Boer ◽

G.J.M. Krijnen ◽

M.C. Elwenspoek

Keyword(s):

In Situ Characterization

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RF MEMS tunable capacitors with large tuning ratio

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290700 ◽

2004 ◽

Author(s):

T.G.S.M. Rijks ◽

J.T.M. van Beek ◽

P.G. Steeneken ◽

M.J.E. Ulenaers ◽

J. De Coster ◽

...

Keyword(s):

Rf Mems ◽

Tunable Capacitors ◽

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A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290561 ◽

2004 ◽

Author(s):

K. Takahata ◽

A. DeHennis ◽

K.D. Wise ◽

Y.B. Gianchandani

Keyword(s):

Blood Vessel ◽

Pressure Sensors

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Silicon liquid flow sensor encapsulation using metal to glass anodic bonding

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290668 ◽

2004 ◽

Author(s):

D. Briand ◽

P. Weber ◽

N.F. de Rooij

Keyword(s):

Liquid Flow ◽

Flow Sensor ◽

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Highly symmetric tri-axis piezoelectric bimorph accelerometer

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290556 ◽

2004 ◽

Author(s):

Qiang Zou ◽

Wei Tan ◽

Eun Sok Kim ◽

G.E. Loeb

Keyword(s):

Piezoelectric Bimorph

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Path-invariant fiber-based interferometric scanners for OCT

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290527 ◽

2004 ◽

Author(s):

Bowen Cheng ◽

Jing-Yi Huang ◽

Ting-Ta Yen ◽

Yuan-Peng Huang ◽

J.A. Yeh

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A clean wafer-scale chip-release process without dicing based on vapor phase etching

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290685 ◽

2004 ◽

Author(s):

T. Overstolz ◽

P.A. Clerc ◽

W. Noell ◽

M. Zickar ◽

N.F. de Rooij

Keyword(s):

Vapor Phase ◽

Release Process ◽

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Bubble-free priming of blind channels

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290563 ◽

2004 ◽

Author(s):

C.P. Steinert ◽

H. Sandmaier ◽

M. Daub ◽

B. de Heij ◽

R. Zengerle

Keyword(s):

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High Q film bulk acoustic resonator from 2.4 to 5.1 GHz

17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest ◽

10.1109/mems.2004.1290707 ◽

2004 ◽

Author(s):

Wei Pang ◽

Hao Zhang ◽

Sangwoo Whangbo ◽

Eun Sok Kim

Keyword(s):

Acoustic Resonator ◽

High Q ◽

Film Bulk Acoustic Resonator ◽

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