Dense plasma focus X-ray source for sub-micron lithography

International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1993.593512 ◽

1993 ◽

Author(s):

R.R. Prasad ◽

M. Krishnan ◽

J. Mangano ◽

P. Greene ◽

N. Qi

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

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Charged particles and x-ray emission studies on a dense plasma focus device

Radiation Effects and Defects in Solids ◽

10.1080/10420150.2020.1845693 ◽

2020 ◽

Vol 175 (11-12) ◽

pp. 1015-1020

Author(s):

S. R. Chung ◽

R. A. Behbahani ◽

C. Xiao

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Charged Particles ◽

Plasma Focus Device ◽

Dense Plasma Focus ◽

X Ray ◽

Emission Studies

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Neon Dense Plasma Focus Point X-ray Source For ≤ 0.25 μm lithography

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.588868 ◽

2005 ◽

Author(s):

R.R. Prasad ◽

M. Krishnan ◽

K. Berg ◽

D. Conlon ◽

J. Mangano

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

X Ray ◽

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Dense Plasma Focus X-ray Source For Lithography

IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma ◽

10.1109/plasma.1992.697919 ◽

2005 ◽

Author(s):

R.R. Prasad ◽

M. Krishnan ◽

J. Mangano ◽

P. Burkhalter ◽

J. Maldonado

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

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Time resolved neutron and hard X-ray emission in the dense plasma focus, revisited

IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science ◽

10.1109/plasma.1997.605064 ◽

2002 ◽

Author(s):

J.S. Brzosko ◽

V. Nardi ◽

C. Powedll ◽

J.R. Brzosko

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

Time Resolved ◽

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The effects of pre-ionization on the impurity and x-ray level in a dense plasma focus device

Physics of Plasmas ◽

10.1063/1.4975615 ◽

2017 ◽

Vol 24 (2) ◽

pp. 022509 ◽

Author(s):

D. Piriaei ◽

H. R. Yousefi ◽

T. D. Mahabadi ◽

A. Salar Elahi ◽

M. Ghoranneviss

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Plasma Focus Device ◽

Dense Plasma Focus ◽

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Interferometry and X-ray diagnostics of pinched helium plasma in a dense plasma focus with an Al-wire on the axis

Physics of Plasmas ◽

10.1063/1.4968227 ◽

2016 ◽

Vol 23 (11) ◽

pp. 112708 ◽

Author(s):

P. Kubes ◽

M. Paduch ◽

B. Cikhardtova ◽

J. Cikhardt ◽

D. Klir ◽

...

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Helium Plasma ◽

Dense Plasma Focus ◽

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X-ray Radiation From Dense Plasma Focus

Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS) ◽

10.1109/plasma.1994.588863 ◽

2005 ◽

Author(s):

I. Vitkovitsky ◽

P. Hebert ◽

K. Ware

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

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Use of a dense plasma focus as an X-ray irradiation facility

10.1109/plasma.1990.110791 ◽

1990 ◽

Author(s):

O. Barnouin ◽

B. Temple ◽

G.H. Miley

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Dense Plasma Focus ◽

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Current sheath dynamics and X-ray emission studies from sequential dense plasma focus device

IEEE Transactions on Plasma Science ◽

10.1109/27.893315 ◽

2000 ◽

Vol 28 (4) ◽

pp. 1263-1270 ◽

Author(s):

R. Gupta ◽

S.R. Mohanty ◽

R.S. Rawat ◽

M.P. Srivastava

Keyword(s):

Plasma Focus ◽

Dense Plasma ◽

Plasma Focus Device ◽

Dense Plasma Focus ◽

Current Sheath ◽

X Ray ◽

Emission Studies

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Poster Session 4P27-45: Fast Z-Pinches, X-Ray Lasers, and Dense Plasma Focus - II

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1339951 ◽

2004 ◽

Keyword(s):

Plasma Focus ◽

Poster Session ◽

Dense Plasma ◽

Dense Plasma Focus ◽

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