Modeling of the plasma heating in unmagnetized low pressure microwave discharges
1997 ◽
Vol 40
(8)
◽
pp. 663-671
◽
1995 ◽
Vol 74-75
◽
pp. 59-62
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2006 ◽
Vol 34
(6)
◽
pp. 2606-2610
◽
2002 ◽
Vol 156
(1-3)
◽
pp. 182-184
◽
2017 ◽
Vol 15
(2)
◽
pp. 1700138
◽
1991 ◽
Vol 19
(2)
◽
pp. 229-239
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