Microwave Discharges in Liquid Hydrocarbons: Physical and Chemical Characterization

Microwave discharges in dielectric liquids are a relatively new area of plasma physics and plasma application. This review cumulates results on microwave discharges in wide classes of liquid hydrocarbons (alkanes, cyclic and aromatic hydrocarbons). Methods of microwave plasma generation, composition of gas products and characteristics of solid carbonaceous products are described. Physical and chemical characteristics of discharge are analyzed on the basis of plasma diagnostics and 0D, 1D and 2D simulation.

CUBIC SILICON CARBIDE ON SILICON

A basic technology for cubic silicon carbide (3C-SiC) formation on silicon (Si) plates in high-frequency (HF and HFI) and very-high-frequency (microwave) discharges at low pressure has been developed. It is found that 3C-SiC layers formation on Si should be multiple staged, but integrated, i.e. sequential change of stages should be performed without working chamber deevacuating and accompanied only by changing modes, gaseous media and applying electrical displacement. The following technological mixtures have been proposed: SiF4 + CF4 + Ar; SiF4 + CH4 + Ar.

Граничное значение поля, разделяющее области подкритических и глубоко подкритических видов СВЧ-разряда, зажигаемого на диэлектрической поверхности

Microwave discharges initiated by an electromagnetic (EM) vibrator and ignited on the inner surface of a dielectric tube in a quasi-optical EM beam are experimentally studied. A threshold level of the microwave field that separates domains of subcritical and deeply subcritical microwave discharges is determined in experiments. Experiments show that streamer channels of the subcritical discharge propagate from the initiator along the propagation direction of the EM wave and in the opposite direction under certain conditions. Variations in the power of the microwave beam can be used to change length of the plasma region of the subcritical discharge along the wave vector of the microwave beam and control the level of the EM energy absorbed in the plasma regions of the deeply subcritical microwave discharge.