A MEMS Type Damping Viscous Vacuum Gauge For High Vacuum Measurement

2020 ◽  
Author(s):  
Chengxiang wang ◽  
Yulie Wu ◽  
Zhanqiang Hou ◽  
Yunbin Kuang ◽  
Yongmeng Zhang ◽  
...  
Keyword(s):  
High Vacuum ◽  
Vacuum Gauge ◽  
Vacuum Measurement

A newly MEMS vacuum gauge with multi-modes for low vacuum measurement

Vacuum ◽  
2021 ◽  
pp. 110446
Author(s):  
Chengxiang wang ◽  
Zhanqiang Hou ◽  
Yunbin Kuang ◽  
Yulie Wu ◽  
Yongmeng Zhang ◽  
...  
Keyword(s):  
Vacuum Gauge ◽  
Vacuum Measurement

A high vacuum gauge expansion calibration system with a selective getter pump

Vacuum ◽  
1981 ◽  
Vol 31 (2) ◽  
pp. 119-120 ◽  
Author(s):  
Huang Zhen Bang ◽  
Huang Kuo-Kai ◽  
Hu Yao-Zhi ◽  
Huang Kuang-Zhou
Keyword(s):  
High Vacuum ◽  
Calibration System ◽  
Vacuum Gauge

Electron-orbit ion gauge—an ultra-high vacuum gauge

Vacuum ◽  
1971 ◽  
Vol 21 (10) ◽  
pp. 453-455 ◽  
Author(s):  
R.K. Fitch ◽  
G.J. Rushton
Keyword(s):  
High Vacuum ◽  
Ultra High Vacuum ◽  
Vacuum Gauge ◽  
Electron Orbit
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