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A novel "high-transmission" phase shift mask for ArF lithographic performance enhancement
Mapping Intimacies
◽
10.1117/12.2572021
◽
2020
◽
Author(s):
Naoto Yonemaru
◽
Kazuaki Matsui
◽
Yosuke Kojima
◽
Tatsuya Nagatomo
◽
Mitsuharu Yamana
Keyword(s):
Phase Shift
◽
Performance Enhancement
◽
High Transmission
◽
Phase Shift Mask
◽
Transmission Phase
Download Full-text
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Development of a new high transmission phase shift mask technology for 10 nm logic node
10.1117/12.2241480
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2016
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Author(s):
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Yoshifumi Sakamoto
◽
Yusuke Toda
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Karen Badger
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Kazunori Seki
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...
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Phase Shift
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High Transmission
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Highly reliable detection and correction of pinched areas for high transmission phase shift mask
10.1117/12.772499
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2008
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Author(s):
Chih Li Chen
◽
Chun-Cheng Liao
◽
Pin-Jan Chou
◽
Chiang Lin Shih
◽
Steven Shih
Keyword(s):
Phase Shift
◽
High Transmission
◽
Reliable Detection
◽
Phase Shift Mask
◽
Transmission Phase
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Design of 200-nm, 170-nm, and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask: II. Experimental results
10.1117/12.354355
◽
1999
◽
Cited By ~ 3
Author(s):
Robert J. Socha
◽
Xuelong Shi
◽
Ken C. Holman
◽
Mircea V. Dusa
◽
Will Conley
◽
...
Keyword(s):
Phase Shift
◽
Experimental Results
◽
High Transmission
◽
Phase Shift Mask
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Imaging behavior of high-transmission attenuating phase-shift mask films
10.1117/12.686231
◽
2006
◽
Author(s):
Michael Hibbs
◽
Satoru Nemoto
◽
Toru Komizo
Keyword(s):
Phase Shift
◽
High Transmission
◽
Phase Shift Mask
Download Full-text
Design of 200-nm, 170-nm, and 140-nm DUV contact sweeper high-transmission attenuating phase-shift mask through simulation I
10.1117/12.332861
◽
1998
◽
Cited By ~ 9
Author(s):
Robert J. Socha
◽
John S. Petersen
◽
J. Fung Chen
◽
Thomas L. Laidig
◽
Kurt E. Wampler
◽
...
Keyword(s):
Phase Shift
◽
High Transmission
◽
Phase Shift Mask
Download Full-text
Realization of practical attenuated phase-shift mask with high-transmission KrF excimer laser exposure
10.1117/12.373331
◽
1999
◽
Author(s):
Nobuhito Toyama
◽
Hiroyuki Miyashita
◽
Yasutaka Morikawa
◽
Hiroshi Fujita
◽
Kazuya Iwase
◽
...
Keyword(s):
Phase Shift
◽
Excimer Laser
◽
Laser Exposure
◽
High Transmission
◽
Krf Excimer Laser
◽
Phase Shift Mask
Download Full-text
High-transmission attenuated phase-shift mask for ArF immersion lithography
10.1117/12.686998
◽
2006
◽
Author(s):
Yosuke Kojima
◽
Takashi Mizoguchi
◽
Takashi Haraguchi
◽
Toshio Konishi
◽
Yoshimitsu Okuda
Keyword(s):
Phase Shift
◽
Immersion Lithography
◽
High Transmission
◽
Phase Shift Mask
Download Full-text
New improving metrology for advanced memory devices with high transmission attenuated phase shift mask
Metrology, Inspection, and Process Control for Microlithography XXXIV
◽
10.1117/12.2552025
◽
2020
◽
Author(s):
Henry Chen
◽
Sheng-Tsung Tsao
◽
CongCong Fan
◽
Jie Du
◽
Richer Yang
◽
...
Keyword(s):
Phase Shift
◽
Memory Devices
◽
High Transmission
◽
Phase Shift Mask
Download Full-text
Realization of mass production for 130-nm node and future applicatiton for high transmission using ZrSi-based attenuated phase-shift mask in ArF lithography
10.1117/12.410706
◽
2001
◽
Author(s):
Toshihiro Ii
◽
Tadashi Saga
◽
Yusuke Hattori
◽
Takashi Ohshima
◽
Masao Otaki
◽
...
Keyword(s):
Phase Shift
◽
Mass Production
◽
High Transmission
◽
Phase Shift Mask
Download Full-text
Optical simulation, optimized design and fabrication of (ZrO2)x–(Al2O3)1−x composite films with thin inserted TiO2 layers for ArF-line high transmission attenuated phase shift mask blank applications
Applied Surface Science
◽
10.1016/j.apsusc.2005.01.121
◽
2005
◽
Vol 252
(4)
◽
pp. 996-1005
◽
Cited By ~ 6
Author(s):
Fu-Der Lai
Keyword(s):
Phase Shift
◽
Composite Films
◽
Optical Simulation
◽
Optimized Design
◽
High Transmission
◽
Phase Shift Mask
Download Full-text
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