scholarly journals EUV microexposures at the ALS using the 0.3-NA MET projection optics

2005 ◽  
Author(s):  
Patrick Naulleau ◽  
Kenneth A. Goldberg ◽  
Erik Anderson ◽  
Jason P. Cain ◽  
Paul Denham ◽  
...  
Keyword(s):  
Projection Optics

Advanced aberration control in projection optics for double patterning

2009 ◽  
Author(s):  
Toshiyuki Yoshihara ◽  
Takashi Sukegawa ◽  
Nobuhiko Yabu ◽  
Masatoshi Kobayashi ◽  
Tadashi Arai ◽  
...  
Keyword(s):  
Double Patterning ◽  
Projection Optics

scholarly journals Multifield direct design method for ultrashort throw ratio projection optics with two tailored mirrors

2016 ◽  
Vol 55 (14) ◽  
pp. 3794 ◽  
Author(s):  
Yunfeng Nie ◽  
Rubén Mohedano ◽  
Pablo Benítez ◽  
Julio Chaves ◽  
Juan C. Miñano ◽  
...  
Keyword(s):  
Design Method ◽  
Direct Design ◽  
Projection Optics

Trefoil Aberration Measurement of Lithographic Projection Optics Based on Linewidth Asymmetry of the Aerial Image

2019 ◽  
Vol 18 (1) ◽  
pp. 373-379
Author(s):  
Qiongyan Yuan ◽  
Xiangzhao Wang ◽  
Zicheng Qiu
Keyword(s):  
Aerial Image ◽  
Projection Optics

Aberration measurement of projection optics in lithographic tools by use of an alternating phase-shifting mask

2006 ◽  
Vol 45 (2) ◽  
pp. 281 ◽  
Author(s):  
Fan Wang ◽  
Xiangzhao Wang ◽  
Mingying Ma ◽  
Dongqing Zhang ◽  
Weijie Shi ◽  
...  
Keyword(s):  
Phase Shifting ◽  
Projection Optics
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