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High-index resist for 193-nm immersion lithography
Mapping Intimacies
◽
10.1117/12.772958
◽
2008
◽
Author(s):
Kazuya Matsumoto
◽
Elizabeth Costner
◽
Isao Nishimura
◽
Mitsuru Ueda
◽
C. Grant Willson
Keyword(s):
High Index
◽
Immersion Lithography
◽
193 Nm
Download Full-text
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◽
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