Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools

Journal of The Electrochemical Society ◽

10.1149/1.1623772 ◽

2003 ◽

Vol 150 (12) ◽

pp. G778 ◽

Author(s):

Brian E. Goodlin ◽

Duane S. Boning ◽

Herbert H. Sawin ◽

Barry M. Wise

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Fault Detection And Classification

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Spatiotemporal Pattern Modeling for Fault Detection and Classification in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2011.2172469 ◽

2012 ◽

Vol 25 (1) ◽

pp. 72-82 ◽

Author(s):

Hyung Jin Chang ◽

Dong Sung Song ◽

Pyo Jae Kim ◽

Jin Young Choi

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Spatiotemporal Pattern ◽

Fault Detection And Classification ◽

Pattern Modeling

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APC Technique and Fault Detection and Classification System in Semiconductor Manufacturing Process

Journal of Institute of Control Robotics and Systems ◽

10.5302/j.icros.2015.15.0095 ◽

2015 ◽

Vol 21 (9) ◽

pp. 875-880

Author(s):

Dae-Geun Ha ◽

Jun-Mo Koo ◽

Dam-Dae Park ◽

Chong-Hun Han

Keyword(s):

Fault Detection ◽

Classification System ◽

Manufacturing Process ◽

Semiconductor Manufacturing ◽

Fault Detection And Classification

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Benchmarking of commercial software for fault detection and classification (FDC) of plasma etchers for semiconductor manufacturing equipment

Proceedings of the 1997 American Control Conference (Cat. No.97CH36041) ◽

10.1109/acc.1997.610849 ◽

1997 ◽

Author(s):

V. Bakshi

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Commercial Software ◽

Manufacturing Equipment ◽

Fault Detection And Classification

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A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks

2019 24th IEEE International Conference on Emerging Technologies and Factory Automation (ETFA) ◽

10.1109/etfa.2019.8869311 ◽

2019 ◽

Author(s):

Tobias Schlosser ◽

Frederik Beuth ◽

Michael Friedrich ◽

Danny Kowerko

Keyword(s):

Neural Networks ◽

Fault Detection ◽

Convolutional Neural Networks ◽

Classification System ◽

Semiconductor Manufacturing ◽

Fault Detection And Classification

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Fault Detection and Classification in Plasma Etch Equipment for Semiconductor Manufacturing $e$-Diagnostics

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2011.2175394 ◽

2012 ◽

Vol 25 (1) ◽

pp. 83-93 ◽

Author(s):

Sang Jeen Hong ◽

Woo Yup Lim ◽

Taesu Cheong ◽

Gary S. May

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Plasma Etch ◽

Fault Detection And Classification

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Methodology for Important Sensor Screening for Fault Detection and Classification in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2020.3037085 ◽

2020 ◽

pp. 1-1

Author(s):

Feng Zhu ◽

Xiaodong Jia ◽

Marcella Miller ◽

Xiang Li ◽

Fei Li ◽

...

Keyword(s):

Fault Detection ◽

Semiconductor Manufacturing ◽

Fault Detection And Classification

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Big data analytic for multivariate fault detection and classification in semiconductor manufacturing

2017 13th IEEE Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2017.8256190 ◽

2017 ◽

Author(s):

Ying-Jen Chen ◽

Bo-Cheng Wang ◽

Jei-Zheng Wu ◽

Yi-Chia Wu ◽

Chen-Fu Chien

Keyword(s):

Big Data ◽

Fault Detection ◽

Semiconductor Manufacturing ◽

Fault Detection And Classification ◽

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An Intelligent Data Mining-Based Fault Detection and Classification Strategy for Microgrid

IEEE Access ◽

10.1109/access.2021.3056534 ◽

2021 ◽

Vol 9 ◽

pp. 22470-22479

Author(s):

Shazia Baloch ◽

Mannan Saeed Muhammad

Keyword(s):

Data Mining ◽

Fault Detection ◽

Fault Detection And Classification ◽

Classification Strategy

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Fault Detection via Sparse Representation for Semiconductor Manufacturing Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2302011 ◽

2014 ◽

Vol 27 (2) ◽

pp. 252-259 ◽

Author(s):

Likun Ren ◽

Weimin Lv

Keyword(s):

Fault Detection ◽

Sparse Representation ◽

Semiconductor Manufacturing ◽

Manufacturing Processes

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Fault Detection and Classification of Power System Busbar using Artificial Neural Network

2019 IEEE International Conference on Power, Electrical, and Electronics and Industrial Applications (PEEIACON) ◽

10.1109/peeiacon48840.2019.9071944 ◽

2019 ◽

Author(s):

Adrita Anika ◽

Md. Junaed-Al-Hossain ◽

Sk. Hasibul Alam ◽

Nahid-Al-Masood

Keyword(s):

Neural Network ◽

Artificial Neural Network ◽

Fault Detection ◽

Power System ◽

Fault Detection And Classification ◽

Artificial Neural

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