IEEE Transactions on Semiconductor Manufacturing
Latest Publications

TOTAL DOCUMENTS

2628

(FIVE YEARS 203)

H-INDEX

(FIVE YEARS 2)

Published By Institute Of Electrical And Electronics Engineers

1558-2345, 0894-6507

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Edge Effects of an Eddy-current Thickness Sensor During Chemical Mechanical Polishing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2022.3141053 ◽

2022 ◽

pp. 1-1

Author(s):

Chengxin Wang ◽

Tongqin Wang ◽

Fangxin Tian ◽

Xinchun Lu

Keyword(s):

Eddy Current ◽

Edge Effects ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing

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Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2022.3143039 ◽

2022 ◽

pp. 1-1

Author(s):

Huidong Zhang ◽

Tianheng Feng ◽

Dragan Djurdjanovic

Keyword(s):

Robust Control ◽

Selection Of

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IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3119482 ◽

2021 ◽

Vol 34 (4) ◽

pp. C4-C4

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Call for Papers for Special Issue on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3119475 ◽

2021 ◽

Vol 34 (4) ◽

pp. 521-521

Keyword(s):

Artificial Intelligence ◽

Semiconductor Manufacturing ◽

Production Level ◽

Special Issue

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IEEE Transactions on Semiconductor Manufacturing publication information

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3119478 ◽

2021 ◽

Vol 34 (4) ◽

pp. C2-C2

Keyword(s):

Semiconductor Manufacturing

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2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3128127 ◽

2021 ◽

Vol 34 (4) ◽

pp. 523-538

Keyword(s):

Semiconductor Manufacturing

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Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3121104 ◽

2021 ◽

Vol 34 (4) ◽

pp. 522-522

Keyword(s):

Electron Devices

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IEEE Transactions on Semiconductor Manufacturing publication information

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3097839 ◽

2021 ◽

Vol 34 (3) ◽

pp. C2-C2

Keyword(s):

Semiconductor Manufacturing

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IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3097846 ◽

2021 ◽

Vol 34 (3) ◽

pp. C4-C4

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Guest Editorial Special Section on the 2020 International Symposium on Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3097819 ◽

2021 ◽

Vol 34 (3) ◽

pp. 278-279

Author(s):

Tsuyoshi Moriya

Keyword(s):

International Symposium ◽

Semiconductor Manufacturing ◽

Guest Editorial ◽

Special Section

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IEEE Transactions on Semiconductor ManufacturingLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Institute Of Electrical And Electronics Engineers

Edge Effects of an Eddy-current Thickness Sensor During Chemical Mechanical Polishing

Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes

Blank page

Call for Papers for Special Issue on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing publication information

2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34

Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference

IEEE Transactions on Semiconductor Manufacturing publication information

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Guest Editorial Special Section on the 2020 International Symposium on Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing
Latest Publications