IEEE Transactions on Semiconductor Manufacturing
Latest Publications

TOTAL DOCUMENTS

2628

(FIVE YEARS 311)

H-INDEX

68

(FIVE YEARS 7)

Published By Institute Of Electrical And Electronics Engineers

1558-2345, 0894-6507

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Edge Effects of an Eddy-current Thickness Sensor During Chemical Mechanical Polishing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2022.3141053 ◽

2022 ◽

pp. 1-1

Author(s):

Chengxin Wang ◽

Tongqin Wang ◽

Fangxin Tian ◽

Xinchun Lu

Keyword(s):

Eddy Current ◽

Edge Effects ◽

Chemical Mechanical Polishing ◽

Mechanical Polishing

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Dynamic Down-Selection of Measurement Markers for Optimized Robust Control of Overlay Errors in Photolithography Processes

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2022.3143039 ◽

2022 ◽

pp. 1-1

Author(s):

Huidong Zhang ◽

Tianheng Feng ◽

Dragan Djurdjanovic

Keyword(s):

Robust Control ◽

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IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3119482 ◽

2021 ◽

Vol 34 (4) ◽

pp. C4-C4

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Call for Papers for Special Issue on Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3119475 ◽

2021 ◽

Vol 34 (4) ◽

pp. 521-521

Keyword(s):

Artificial Intelligence ◽

Semiconductor Manufacturing ◽

Production Level ◽

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IEEE Transactions on Semiconductor Manufacturing publication information

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3119478 ◽

2021 ◽

Vol 34 (4) ◽

pp. C2-C2

Keyword(s):

Semiconductor Manufacturing

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2021 Index IEEE Transactions on Semiconductor Manufacturing Vol. 34

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3128127 ◽

2021 ◽

Vol 34 (4) ◽

pp. 523-538

Keyword(s):

Semiconductor Manufacturing

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Call for Papers 6th IEEE Electron Devices Technology and Manufacturing (EDTM) Conference

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3121104 ◽

2021 ◽

Vol 34 (4) ◽

pp. 522-522

Keyword(s):

Electron Devices

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IEEE Transactions on Semiconductor Manufacturing publication information

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3097839 ◽

2021 ◽

Vol 34 (3) ◽

pp. C2-C2

Keyword(s):

Semiconductor Manufacturing

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IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3097846 ◽

2021 ◽

Vol 34 (3) ◽

pp. C4-C4

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Guest Editorial Special Section on the 2020 International Symposium on Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2021.3097819 ◽

2021 ◽

Vol 34 (3) ◽

pp. 278-279

Author(s):

Tsuyoshi Moriya

Keyword(s):

International Symposium ◽

Semiconductor Manufacturing ◽

Guest Editorial ◽

Special Section

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