Special issue on high accuracy optical and non-contact measuring techniques. Thickness measurement of semiconductor by Application of Infrared light.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.717 ◽

1985 ◽

Vol 51 (4) ◽

pp. 717-721

Author(s):

RENSHI SAWADA

Keyword(s):

Thickness Measurement ◽

High Accuracy ◽

Infrared Light ◽

Special Issue ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. Surface roughness measurement by scanning microscope.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.688 ◽

1985 ◽

Vol 51 (4) ◽

pp. 688-694

Author(s):

HISAYOSHI SATO

Keyword(s):

Surface Roughness ◽

High Accuracy ◽

Special Issue ◽

Scanning Microscope ◽

Roughness Measurement ◽

Surface Roughness Measurement ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. In-process sensor for surface roughness and its application.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.681 ◽

1985 ◽

Vol 51 (4) ◽

pp. 681-687

Author(s):

KIMIYUKI MITSUI

Keyword(s):

Surface Roughness ◽

High Accuracy ◽

Special Issue ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. Application of the PSD for position sensing.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.730 ◽

1985 ◽

Vol 51 (4) ◽

pp. 730-737 ◽

Author(s):

KAZUO KURASAWA

Keyword(s):

High Accuracy ◽

Special Issue ◽

Position Sensing ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. Trend in high accuracy noncontact measurement of macro- and micro-form.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.663 ◽

1985 ◽

Vol 51 (4) ◽

pp. 663-667

Author(s):

TADAO TSUKADA

Keyword(s):

High Accuracy ◽

Special Issue ◽

Noncontact Measurement ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. Measurement of the ultra precision diamond-turned surfaces by laser scatterometer.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.668 ◽

1985 ◽

Vol 51 (4) ◽

pp. 668-673 ◽

Author(s):

KEIJI KAMIGAKI

Keyword(s):

High Accuracy ◽

Special Issue ◽

Measuring Techniques ◽

Ultra Precision

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Special issue on high accuracy optical and non-contact measuring techniques. Measurement of surfaces with contact and non-contact methods.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.674 ◽

1985 ◽

Vol 51 (4) ◽

pp. 674-680 ◽

Author(s):

KOZO MIYAMOTO

Keyword(s):

High Accuracy ◽

Special Issue ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. High accuracy non-contact-measuring techniques of high precision cylindrical and spherical parts.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.706 ◽

1985 ◽

Vol 51 (4) ◽

pp. 706-711

Author(s):

TOHRU KANADA

Keyword(s):

High Precision ◽

High Accuracy ◽

Special Issue ◽

Measuring Techniques

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Special issue on high accuracy optical and non-contact measuring techniques. Applications of light-section method for automatic manufacturing.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.703 ◽

1985 ◽

Vol 51 (4) ◽

pp. 703-705

Author(s):

YASUO NAKAGAWA

Keyword(s):

High Accuracy ◽

Special Issue ◽

Section Method ◽

Light Section ◽

Measuring Techniques ◽

Automatic Manufacturing

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Special issue on high accuracy optical and non-contact measuring techniques. Measurement of thickness and shape by focusing the pattern projected on surfaces.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.712 ◽

1985 ◽

Vol 51 (4) ◽

pp. 712-716

Author(s):

YOSHITADA OSHIDA

Keyword(s):

High Accuracy ◽

Special Issue ◽

Measuring Techniques ◽

Measurement Of Thickness

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Special issue on high accuracy optical and non-contact measuring techniques. Recent progress in optical interferometric measurement.

Journal of the Japan Society of Precision Engineering ◽

10.2493/jjspe1933.51.695 ◽

1985 ◽

Vol 51 (4) ◽

pp. 695-702 ◽

Author(s):

TOYOHIKO YATAGAI

Keyword(s):

Recent Progress ◽

High Accuracy ◽

Special Issue ◽

Interferometric Measurement ◽

Measuring Techniques

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