Research on a Novel Compensation Algorithm for MEMS Sub-Pixel Displacement Measurement

The sub-pixel allocation is a key technology for achieving high-precision measurement for micro electro mechanical system (MEMS). In this paper, a novel sub-pixel compensation algorithm based on an improved gradient algorithm utilized in a rough sub-pixel position is proposed to compensate the insufficient accuracy extracted by the surface fitting. And compared with traditional gradient used in the integer pixel, the proposed algorithm can reduce the error introduced by abandoning the higher order term without using iteration and second-order Taylor formula. The experimental results show that the displacement parameters calculated by the proposed algorithm is more accurate, and the method has a good noise resistance, it can meet high-precision positioning of MEMS motion image.