LIGA and Its Applications - Advanced Micro and Nanosystems
Latest Publications

TOTAL DOCUMENTS

21
(FIVE YEARS 0)

H-INDEX

2
(FIVE YEARS 0)

Published By Wiley

9783527316984, 9783527622573
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

X‐Ray Masks for LIGA Microfabrication

2008 ◽  
pp. 11-50 ◽  
Author(s):  
Yohannes Desta ◽  
Jost Goettert
Keyword(s):  
X Ray

Filled Resist Systems

2008 ◽  
pp. 415-441
Author(s):  
Thomas Hanemann ◽  
Claas Müller ◽  
Michael Schulz

Evolution of the Microspectrometer

2008 ◽  
pp. 281-296 ◽  
Author(s):  
Reiner Wechsung ◽  
Sven Schönfelder ◽  
Andreas Decker

Exposure and Development Simulation for Deep X‐Ray LIGA

2008 ◽  
pp. 103-142
Author(s):  
Jan G. Korvink ◽  
Sadik Hafizovic ◽  
Yoshikazu Hirai ◽  
Pascal Meyer
Keyword(s):  
X Ray

Dramatic Downsizing of Soft X‐Ray Synchrotron Light Source from Compact to Tabletop

2008 ◽  
pp. 443-452
Author(s):  
Hironari Yamada ◽  
Norio Toyosugi ◽  
Dorian Minkov ◽  
Yoshiko Okazaki
Keyword(s):  
Light Source ◽  
X Ray ◽  
Synchrotron Light

The Micro Harmonic Drive Gear

2008 ◽  
pp. 351-394
Author(s):  
Reinhard Degen ◽  
Rolf Slatter
Keyword(s):  
Harmonic Drive ◽  
Drive Gear
Load More ...
Sign in / Sign up

Export Citation Format

Share Document