Methods and Materials in Microelectronic Technology
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15

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2

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Published By Springer US

9781468448498, 9781468448474

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Electron Beam Lithography

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_7 ◽

1984 ◽

pp. 127-145 ◽

Author(s):

W. Kulcke

Keyword(s):

Electron Beam ◽

Electron Beam Lithography

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Limitations of Digital Electronics

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_14 ◽

1984 ◽

pp. 321-335

Author(s):

Otto G. Folberth

Keyword(s):

Digital Electronics

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High Performance Cooling and Large Scale Integration

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_13 ◽

1984 ◽

pp. 299-320

Author(s):

Robert W. Keyes

Keyword(s):

High Performance ◽

Large Scale ◽

Large Scale Integration ◽

Scale Integration

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Organic Insulators

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_11 ◽

1984 ◽

pp. 269-288

Author(s):

Markus A. Zuegel

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Multilayer Ceramic

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_12 ◽

1984 ◽

pp. 289-298

Author(s):

Rainer O. Stahl

Keyword(s):

Multilayer Ceramic

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Lithographic Materials

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_9 ◽

1984 ◽

pp. 181-241 ◽

Author(s):

Joachim Bargon

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Impact of Microelectronics — Technical, Economical and Social Aspects

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_1 ◽

1984 ◽

pp. 1-18

Author(s):

Dieter Seitzer

Keyword(s):

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Photolithography and X-ray Lithography

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_6 ◽

1984 ◽

pp. 99-126 ◽

Author(s):

A. Heuberger

Keyword(s):

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Silicide Contact and Gate in Microelectronic Devices

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_5 ◽

1984 ◽

pp. 83-97

Author(s):

K. N. Tu

Keyword(s):

Microelectronic Devices

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Electron Beam Microcircuit Inspection Techniques

Methods and Materials in Microelectronic Technology ◽

10.1007/978-1-4684-4847-4_15 ◽

1984 ◽

pp. 337-356

Author(s):

Erich Kubalek ◽

Eberhard Menzel

Keyword(s):

Electron Beam ◽

Inspection Techniques

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