Optical Diagnostics for Thin Film Processing
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Published By Elsevier

9780123420701

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Overview of Optical Diagnostics

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50002-4 ◽

1996 ◽

pp. 1-55 ◽

Cited By ~ 6

Author(s):

Irving P. Herman

Keyword(s):

Optical Diagnostics

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Pyrometry

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50014-0 ◽

1996 ◽

pp. 591-617

Author(s):

Irving P. Herman

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Elastic Scattering and Diffraction from Particles and Nonplanar Surfaces (Scatterometry)

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50012-7 ◽

1996 ◽

pp. 495-557

Author(s):

Irving P. Herman

Keyword(s):

Elastic Scattering

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Copyright

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-0-12-342070-1.50023-1 ◽

1996 ◽

pp. iv

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Transmission (Absorption)

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50009-7 ◽

1996 ◽

pp. 263-325

Author(s):

Irving P. Herman

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Data Analysis and Process Control

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50020-6 ◽

1996 ◽

pp. 715-738

Author(s):

Irving P. Herman

Keyword(s):

Data Analysis ◽

Process Control

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Notations and Symbols

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50001-2 ◽

1996 ◽

pp. xix-xxix

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Reflection

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50010-3 ◽

1996 ◽

pp. 327-479 ◽

Cited By ~ 4

Author(s):

Irving P. Herman

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Optical Electron/Ion Probes

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50018-8 ◽

1996 ◽

pp. 673-687

Author(s):

Irving P. Herman

Keyword(s):

Optical Electron

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Nonlinear Optical Diagnostics

Optical Diagnostics for Thin Film Processing ◽

10.1016/b978-012342070-1/50017-6 ◽

1996 ◽

pp. 655-672 ◽

Cited By ~ 10

Author(s):

Irving P. Herman

Keyword(s):

Nonlinear Optical ◽

Optical Diagnostics

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