Atomic Layer Deposition
Latest Publications

TOTAL DOCUMENTS

11

(FIVE YEARS 0)

H-INDEX

2

(FIVE YEARS 0)

Published By John Wiley & Sons, Inc.

9781118747407, 9781118062777

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Nitrides and Other Compounds

Atomic Layer Deposition ◽

10.1002/9781118747407.ch5 ◽

2013 ◽

pp. 161-182

Organic and Hybrid Materials

Atomic Layer Deposition ◽

10.1002/9781118747407.ch7 ◽

2013 ◽

pp. 207-213

Keyword(s):

Hybrid Materials

Index

Atomic Layer Deposition ◽

10.1002/9781118747407.index ◽

2013 ◽

pp. 243-253

Metals

Atomic Layer Deposition ◽

10.1002/9781118747407.ch6 ◽

2013 ◽

pp. 183-206

III-V Semiconductor Films

Atomic Layer Deposition ◽

10.1002/9781118747407.ch3 ◽

2013 ◽

pp. 51-66

Keyword(s):

Semiconductor Films

Elemental Semiconductor Epitaxial Films

Atomic Layer Deposition ◽

10.1002/9781118747407.ch2 ◽

2013 ◽

pp. 33-49

Keyword(s):

Epitaxial Films ◽

Elemental Semiconductor

ALD Applications and Industry

Atomic Layer Deposition ◽

10.1002/9781118747407.ch8 ◽

2013 ◽

pp. 215-242 ◽

Cited By ~ 5

Oxide films

Atomic Layer Deposition ◽

10.1002/9781118747407.ch4 ◽

2013 ◽

pp. 67-159

Keyword(s):

Oxide Films

Also of Interest

Atomic Layer Deposition ◽

10.1002/9781118747407.pubnote ◽

2013 ◽

pp. 255-256

Front Matter

Atomic Layer Deposition ◽

10.1002/9781118747407.fmatter ◽

2013 ◽

pp. i-xv