Microelectronics Manufacturing Diagnostics Handbook
Latest Publications

TOTAL DOCUMENTS

20
(FIVE YEARS 0)

H-INDEX

1
(FIVE YEARS 0)

Published By Springer US

9781461358404, 9781461520290
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Traceability

1993 ◽  
pp. 320-347
Author(s):  
Kevin G. Carswell ◽  
Richard B. Humphrey ◽  
Ramesh A. Mirchandani ◽  
Lloyd M. Young

Product Dimensional Metrology and Pattern Defect Inspection

1993 ◽  
pp. 95-134
Author(s):  
Henri A. Khoury ◽  
Timothy R. Groves ◽  
Christian H. Plougonven
Keyword(s):  
Defect Inspection ◽  
Dimensional Metrology

Defect Prevention

1993 ◽  
pp. 605-622
Author(s):  
Bruce E. Blake ◽  
Jerry A. Lorenzen
Keyword(s):  
Defect Prevention

Repair and Rework

1993 ◽  
pp. 205-230
Author(s):  
Thomas A. Wassick ◽  
Cheryl B. Field ◽  
C. C. Hu
Load More ...
Sign in / Sign up

Export Citation Format

Share Document