1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)
Latest Publications

TOTAL DOCUMENTS

(FIVE YEARS 0)

H-INDEX

(FIVE YEARS 0)

Published By IEEE

0780337522

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Metallic contaminants generation from tubing during start-up and following moisture upsets in HCl distribution systems

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664629 ◽

2002 ◽

Author(s):

N. Anderson ◽

G. Vereecke ◽

M.M. Heyns ◽

P. Espitalier-Noel

Keyword(s):

Distribution Systems ◽

Start Up ◽

Metallic Contaminants

Download Full-text

An integrated approach to planning and scheduling at Philips Semiconductors

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664528 ◽

2002 ◽

Author(s):

C. Malmstrom

Keyword(s):

Integrated Approach ◽

Planning And Scheduling

Download Full-text

AMHS for 300 mm wafer

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664525 ◽

2002 ◽

Cited By ~ 13

Author(s):

R. Kurosaki ◽

N. Nagao ◽

H. Komada ◽

Y. Watanabe ◽

H. Yano

Download Full-text

A new economical wafer drying technology with high process performance

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664555 ◽

2002 ◽

Author(s):

K. Asada ◽

H. Iwamoto ◽

T. Hashiguchi ◽

Y. Okamoto ◽

T. Minami ◽

...

Keyword(s):

Process Performance ◽

Drying Technology

Download Full-text

Managing overall equipment effectiveness [OEE] to optimize factory performance

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664488 ◽

2002 ◽

Cited By ~ 11

Author(s):

T. Pomorski

Download Full-text

Training time reduction in producing certified manufacturing technicians for a fabrication environment

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664483 ◽

2002 ◽

Author(s):

F. Sheehy

Keyword(s):

Training Time ◽

Time Reduction

Download Full-text

Integrated test facility (ITF)-automation testing to support Intel's manufacturing output

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664526 ◽

2002 ◽

Cited By ~ 2

Author(s):

J. Bisgrove ◽

R. Dayao ◽

B. Houser ◽

T. Jones ◽

J.C. Mayes ◽

...

Keyword(s):

Test Facility ◽

Automation Testing

Download Full-text

Improving diffusion furnace capability using model-based temperature control in a production environment

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664522 ◽

2002 ◽

Cited By ~ 3

Author(s):

M. Yelverton ◽

K. Stoddard ◽

B. Cusson ◽

T. Timmons

Keyword(s):

Temperature Control ◽

Production Environment ◽

Model Based

Download Full-text

Construction of an energy-saving semiconductor plant

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664623 ◽

2002 ◽

Author(s):

T. Wakuda ◽

K. Nagata ◽

M. Kojima

Keyword(s):

Energy Saving

Download Full-text

Modular metrology tools for productivity enhancement in wafer fabs

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023) ◽

10.1109/issm.1997.664498 ◽

2002 ◽

Cited By ~ 2

Author(s):

C. Schneider ◽

L. Pfitzner ◽

H. Ryssel

Keyword(s):

Productivity Enhancement

Download Full-text

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Metallic contaminants generation from tubing during start-up and following moisture upsets in HCl distribution systems

An integrated approach to planning and scheduling at Philips Semiconductors

AMHS for 300 mm wafer

A new economical wafer drying technology with high process performance

Managing overall equipment effectiveness [OEE] to optimize factory performance

Training time reduction in producing certified manufacturing technicians for a fabrication environment

Integrated test facility (ITF)-automation testing to support Intel's manufacturing output

Improving diffusion furnace capability using model-based temperature control in a production environment

Construction of an energy-saving semiconductor plant

Modular metrology tools for productivity enhancement in wafer fabs

1997 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat. No.97CH36023)
Latest Publications