Lecture Notes on Principles of Plasma Processing
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Published By Springer US

9780306474972, 9781461501817

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Atomic Energy Levels

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_19 ◽

2003 ◽

pp. 125-126

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Energy Levels ◽

Atomic Energy ◽

Atomic Energy Levels

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Fundamentals of Feature Evolution in Plasma Etching

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_38 ◽

2003 ◽

pp. 183-185

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Plasma Etching ◽

Feature Evolution

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Practical Gas Kinetic Models and Macroscopic Properties

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_17 ◽

2003 ◽

pp. 109-119

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Kinetic Models ◽

Macroscopic Properties

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Atomic Collisions

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_20 ◽

2003 ◽

pp. 126-129

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Atomic Collisions

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Detailed Reaction Modeling

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_37 ◽

2003 ◽

pp. 179-181

Author(s):

Francis F. Chen ◽

Jane P. Chang

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Inelastic Collisions

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_22 ◽

2003 ◽

pp. 130-136 ◽

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Inelastic Collisions

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Other Local Diagnostics

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_13 ◽

2003 ◽

pp. 93-97

Author(s):

Francis F. Chen ◽

Jane P. Chang

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Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_35 ◽

2003 ◽

pp. 177-178

Author(s):

Francis F. Chen ◽

Jane P. Chang

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Elastic Collisions

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_21 ◽

2003 ◽

pp. 129-130

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Elastic Collisions

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Laser Interferometry

Lecture Notes on Principles of Plasma Processing ◽

10.1007/978-1-4615-0181-7_30 ◽

2003 ◽

pp. 162-163

Author(s):

Francis F. Chen ◽

Jane P. Chang

Keyword(s):

Laser Interferometry

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