Copper Interconnect Technology
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Current Practice

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin
Keyword(s):  
Current Practice

Cu/ILD Barriers

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin

Interconnect Issues

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin

Introduction

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin

Backmatter

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin

Front Matter

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin

Interlayer Dielectrics

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin
Keyword(s):  
Interlayer Dielectrics

Copper Patterning

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin

Copper Deposition

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin
Keyword(s):  
Copper Deposition
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