interlayer dielectrics
Recently Published Documents

TOTAL DOCUMENTS

78
(FIVE YEARS 4)

H-INDEX

18
(FIVE YEARS 2)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

All-carbocycle hydrocarbon thermosets with high thermal stability and robust mechanical strength for low-k interlayer dielectrics

2021 ◽  
Author(s):  
Yudi Feng ◽  
Ke Jin ◽  
Jia Guo ◽  
Changchun Wang
Keyword(s):  
Thermal Stability ◽  
Mechanical Strength ◽  
Dielectric Materials ◽  
High Thermal Stability ◽  
Thermal Stabilities ◽  
Interlayer Dielectric ◽  
Interlayer Dielectrics ◽  
Low Permittivity ◽  
Low K

The development of modern microelectronic industry calls for low permittivity interlayer dielectric materials with excellent thermal stabilities, robust mechanical strength and matching processability. Traditionally, it is difficult to fabricate materials...

Interlayer dielectrics based on copolyimides containing non-coplanar alicyclic-units for multilevel high-speed electronics

2020 ◽  
Vol 90 ◽  
pp. 106704
Author(s):  
A.I. Barzic ◽  
C. Hulubei ◽  
M. Asandulesa ◽  
G. Lisa ◽  
D. Popovici ◽  
...  
Keyword(s):  
High Speed ◽  
Interlayer Dielectrics

An Electron Paramagnetic Resonance Study of Defects in Interlayer Dielectrics

2019 ◽  
Vol 35 (4) ◽  
pp. 747-756 ◽  
Author(s):  
Brad C. Bittel ◽  
Thomas Pomorski ◽  
Patrick M. Lenahan ◽  
Sean King
Keyword(s):  
Electron Paramagnetic Resonance ◽  
Electron Paramagnetic Resonance Study ◽  
Paramagnetic Resonance ◽  
Interlayer Dielectrics ◽  
Electron Paramagnetic

Surface Planarization of Polymeric Interlayer Dielectrics for FOWLP Applications

2018 ◽  
Author(s):  
Soojung Kang ◽  
Yejin Kim ◽  
Ayoung Moon ◽  
Sangwon Lee ◽  
Sarah Eunkyung Kim ◽  
...  
Keyword(s):  
Interlayer Dielectrics

scholarly journals Carbon-Enriched Amorphous Hydrogenated Boron Carbide Films for Very-Low-k Interlayer Dielectrics

2017 ◽  
Vol 3 (12) ◽  
pp. 1700116 ◽  
Author(s):  
Bradley J. Nordell ◽  
Thuong D. Nguyen ◽  
Anthony N. Caruso ◽  
Sudhaunshu S. Purohit ◽  
Nathan A. Oyler ◽  
...  
Keyword(s):  
Boron Carbide ◽  
Interlayer Dielectrics ◽  
Amorphous Hydrogenated Boron Carbide ◽  
Low K

Interlayer Dielectrics

2017 ◽  
Author(s):  
Christoph Steinbrüchel ◽  
Barry L. Chin
Keyword(s):  
Interlayer Dielectrics

Novel flowable CVD process technology for sub-20nm interlayer dielectrics

2012 ◽  
Author(s):  
Honggun Kim ◽  
Seungheon Lee ◽  
Jun-Won Lee ◽  
ByeongJu Bae ◽  
YongSoon Choi ◽  
...  
Keyword(s):  
Process Technology ◽  
Interlayer Dielectrics
Load More ...
Sign in / Sign up

Export Citation Format

Share Document