Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control
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14

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1

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Published By Springer International Publishing

9783319066165, 9783319066172

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Shunt Control

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_6 ◽

2014 ◽

pp. 155-174

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

Keyword(s):

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Mechanical Design: Flexure-Based Nanopositioners

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_4 ◽

2014 ◽

pp. 57-102

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

Keyword(s):

Mechanical Design

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Piezoelectric Transducers

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_2 ◽

2014 ◽

pp. 17-41 ◽

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

Keyword(s):

Piezoelectric Transducers

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Types of Nanopositioners

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_3 ◽

2014 ◽

pp. 43-55 ◽

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

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Charge Drives

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_12 ◽

2014 ◽

pp. 317-336

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

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Feedforward Control

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_9 ◽

2014 ◽

pp. 251-273

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

Keyword(s):

Feedforward Control

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Hysteresis Modeling and Control

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_11 ◽

2014 ◽

pp. 299-316 ◽

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

Keyword(s):

Modeling And Control ◽

Hysteresis Modeling ◽

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Force Feedback Control

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_8 ◽

2014 ◽

pp. 221-249

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

Keyword(s):

Feedback Control ◽

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Position Sensors

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_5 ◽

2014 ◽

pp. 103-153

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

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Introduction

Design, Modeling and Control of Nanopositioning Systems - Advances in Industrial Control ◽

10.1007/978-3-319-06617-2_1 ◽

2014 ◽

pp. 1-15 ◽

Author(s):

Andrew J. Fleming ◽

Kam K. Leang

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