scholarly journals Level Planarity: Transitivity vs. Even Crossings

2018 ◽  
pp. 39-52 ◽  
Author(s):  
Guido Brückner ◽  
Ignaz Rutter ◽  
Peter Stumpf
Keyword(s):  
Level Planarity

Beyond Level Planarity

2016 ◽  
pp. 482-495 ◽  
Author(s):  
Patrizio Angelini ◽  
Giordano Da Lozzo ◽  
Giuseppe Di Battista ◽  
Fabrizio Frati ◽  
Maurizio Patrignani ◽  
...  
Keyword(s):  
Level Planarity

scholarly journals Cyclic Level Planarity Testing and Embedding

2008 ◽  
pp. 50-61 ◽  
Author(s):  
Christian Bachmaier ◽  
Wolfgang Brunner ◽  
Christof König
Keyword(s):  
Level Planarity

scholarly journals Hanani–Tutte, Monotone Drawings, and Level-Planarity

2012 ◽  
pp. 263-287 ◽  
Author(s):  
Radoslav Fulek ◽  
Michael J. Pelsmajer ◽  
Marcus Schaefer ◽  
Daniel Štefankovič
Keyword(s):  
Level Planarity

A Study on STI and Damascene CMP using Chip Level Simulation

2001 ◽  
Vol 671 ◽  
Author(s):  
Kyung-Hyun Kim ◽  
Yoo-Hyon Kim ◽  
Kwang-Bok Kim ◽  
Chang-Ki Hong ◽  
Moon-Hyun Yoo
Keyword(s):  
Chemical Mechanical Polishing ◽  
Thickness Distribution ◽  
Measured Data ◽  
Mechanical Polishing ◽  
Process Conditions ◽  
Spring Model ◽  
Design Rules ◽  
Erosion Model ◽  
Level Planarity ◽  
Elastic Spring

ABSTRACTSimulation of chemical-mechanical polishing is important because the chip-level planarity are difficult to control. The simulator has been developed for predicting and optimizing the thickness distribution after the STI and damascene CMP as well as ILD CMP using chip-level pattern density, elastic spring model and erosion model. In this study, the results of CMP simulation is shown to agree well with the measured data. The simulator can be used to optimize CMP process conditions and to generate design rules for filling dummy patterns which are used to improve the planarity and uniformity.

scholarly journals Radial Level Planarity Testing and Embedding in Linear Time

2004 ◽  
pp. 393-405 ◽  
Author(s):  
Christian Bachmaier ◽  
Franz J. Brandenburg ◽  
Michael Forster
Keyword(s):  
Linear Time ◽  
Level Planarity

scholarly journals Radial Level Planarity Testing and Embedding in Linear Time

2005 ◽  
Vol 9 (1) ◽  
pp. 53-97 ◽  
Author(s):  
Christian Bachmaier ◽  
Franz J. Brandenburg ◽  
Michael Forster
Keyword(s):  
Linear Time ◽  
Level Planarity
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