Measurement of Internal Stress in Thin Silicon Membranes

1990 ◽  
pp. 177-182
Author(s):  
S. Büttgenbach ◽  
W. Engelhardt ◽  
W. Kulcke
Keyword(s):  
Internal Stress ◽  
Thin Silicon ◽  
Silicon Membranes

Scattering of longitudinal acoustic phonons in thin silicon membranes

2017 ◽  
Author(s):  
Dhruv Gelda ◽  
Marc G. Ghossoub ◽  
Krishna V. Valavala ◽  
Manjunath C. Rajagopal ◽  
Sanjiv Sinha
Keyword(s):  
Acoustic Phonons ◽  
Longitudinal Acoustic ◽  
Thin Silicon ◽  
Silicon Membranes

Noncontacting laser-based techniques for the determination of elastic constants of thin silicon membranes

2001 ◽  
Vol 57-58 ◽  
pp. 475-479 ◽  
Author(s):  
B. Weiss ◽  
M. Klein ◽  
E. Sossna ◽  
B. Volland ◽  
I.W. Rangelow
Keyword(s):  
Elastic Constants ◽  
Thin Silicon ◽  
Silicon Membranes

Solar cell preparation in thin silicon membranes

2002 ◽  
Author(s):  
M. Libezny ◽  
J. Poortmans ◽  
M. Caymax ◽  
G. Beaucame ◽  
W. Laureys ◽  
...  
Keyword(s):  
Solar Cell ◽  
Cell Preparation ◽  
Thin Silicon ◽  
Silicon Membranes

High mechanical stress applied to FD-SOI transistors using ultra-thin silicon membranes

2009 ◽  
Author(s):  
Bogdan Bercu ◽  
Laurent Montes ◽  
Florent Rochette ◽  
Mireille Mouis ◽  
Xu Xin ◽  
...  
Keyword(s):  
Mechanical Stress ◽  
Thin Silicon ◽  
Silicon Membranes ◽  
High Mechanical Stress

scholarly journals Lifetime of high-order thickness resonances of thin silicon membranes

Ultrasonics ◽  
2015 ◽  
Vol 56 ◽  
pp. 116-121 ◽  
Author(s):  
A.A. Maznev ◽  
F. Hofmann ◽  
J. Cuffe ◽  
J.K. Eliason ◽  
K.A. Nelson
Keyword(s):  
High Order ◽  
Thin Silicon ◽  
Silicon Membranes
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