Gas-phase reactions of CF3 and CF2 with hydrogen atoms: Their significance in plasma processing
1984 ◽
Vol 4
(3)
◽
pp. 141-146
◽
1978 ◽
Vol 43
(14)
◽
pp. 2800-2802
◽
1970 ◽
Vol 74
(1)
◽
pp. 59-63
◽
Keyword(s):
Keyword(s):
1984 ◽
Vol 4
(4)
◽
pp. 271-283
◽
1992 ◽
Vol 114
(23)
◽
pp. 9205-9206
◽
Keyword(s):
Keyword(s):
1986 ◽
Vol 6
(3)
◽
pp. 247-258
◽