Thermal error modeling and compensation of long-travel nanopositioning stage

2012 ◽  
Vol 65 (1-4) ◽  
pp. 443-450 ◽  
Author(s):  
Jingshu Wang ◽  
Changan Zhu ◽  
Mingchi Feng ◽  
Wenqi Ren
2021 ◽  
Vol 29 (11) ◽  
pp. 2649-2660
Author(s):  
Xin-yuan WEI ◽  
◽  
Yu-chen CHEN ◽  
En-ming MIAO ◽  
Xu-gang FENG ◽  
...  

2020 ◽  
Vol 1576 ◽  
pp. 012003
Author(s):  
Peiwen Li ◽  
Ping Lou ◽  
Junwei Yan ◽  
Nianyun Liu

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