Mechanism of backside etching of transparent materials with nanosecond UV-lasers

2010 ◽  
Vol 101 (2) ◽  
pp. 405-410 ◽  
Author(s):  
K. Zimmer ◽  
R. Böhme ◽  
M. Ehrhardt ◽  
B. Rauschenbach
Equipment ◽  
2006 ◽  
Author(s):  
O. Wellele ◽  
H. R. B. Orlande ◽  
Nerbe J. Ruperti, Jr. ◽  
Marcelo J. Colaco ◽  
A. Delmas

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