A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks

2020 ◽  
Author(s):  
Sinyoung Kim ◽  
Jaeyeon Jang ◽  
Chang Ouk Kim
Keyword(s):  
Least Squares ◽  
Chemical Mechanical Planarization ◽  
Generative Adversarial Networks ◽  
Adversarial Networks ◽  
Planarization Process

scholarly journals On the Effectiveness of Least Squares Generative Adversarial Networks

2019 ◽  
Vol 41 (12) ◽  
pp. 2947-2960 ◽  
Author(s):  
Xudong Mao ◽  
Qing Li ◽  
Haoran Xie ◽  
Raymond Y.K. Lau ◽  
Zhen Wang ◽  
...  
Keyword(s):  
Least Squares ◽  
Generative Adversarial Networks ◽  
Adversarial Networks

scholarly journals Least Squares Generative Adversarial Networks

2017 ◽  
Author(s):  
Xudong Mao ◽  
Qing Li ◽  
Haoran Xie ◽  
Raymond Y.K. Lau ◽  
Zhen Wang ◽  
...  
Keyword(s):  
Least Squares ◽  
Generative Adversarial Networks ◽  
Adversarial Networks
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