Two-Coordinate Digital Autocollimator

2005 ◽  
Vol 48 (9) ◽  
pp. 901-906 ◽  
Author(s):  
V. L. Shur ◽  
A. Ya. Lukin ◽  
Yu. N. Shestopalov ◽  
O. I. Popov
Keyword(s):  
Digital Autocollimator

A digital autocollimator

2009 ◽  
Vol 76 (10) ◽  
pp. 624 ◽  
Author(s):  
A. N. Korolev ◽  
A. I. Gartsuev ◽  
G. S. Polishchuk ◽  
V. P. Tregub
Keyword(s):  
Digital Autocollimator

Compact two-coordinate digital autocollimator

2019 ◽  
Vol 86 (8) ◽  
pp. 476
Author(s):  
Yu. P. Zhukov ◽  
I. L. Lovchiĭ ◽  
Yu. I. Pestov ◽  
V. A. Sergeev ◽  
B. G. Stradov
Keyword(s):  
Digital Autocollimator

Estimation of metrological characteristics of a high-precision digital autocollimator using an angle encoder

2018 ◽  
Vol 85 (7) ◽  
pp. 406 ◽  
Author(s):  
T. A. Andreeva ◽  
E. D. Bokhman ◽  
V. Yu. Venediktov ◽  
S. V. Gordeev ◽  
A. N. Korolev ◽  
...  
Keyword(s):  
High Precision ◽  
Metrological Characteristics ◽  
Digital Autocollimator ◽  
Angle Encoder

Calibration of a compact XUV soft X-ray monochromator with a digital autocollimatorin situ

2016 ◽  
Vol 23 (5) ◽  
pp. 1232-1236
Author(s):  
Jih-Young Yuh ◽  
Shang-Wei Lin ◽  
Liang-Jen Huang ◽  
Long-Life Lee
Keyword(s):  
High Resolution ◽  
Angular Resolution ◽  
Extreme Ultraviolet ◽  
High Vacuum ◽  
Energy Shift ◽  
Ultra High Vacuum ◽  
Lateral Movement ◽  
X Ray ◽  
Digital Autocollimator ◽  
Scanning Mechanism

A digital autocollimator of resolution 0.1 µrad (0.02 arcsec) serves as a handy correction tool for calibrating the angular uncertainty during angular and lateral movements of gratings inside a monochromator chamber under ultra-high vacuum. The photon energy dispersed from the extreme ultraviolet (XUV) to the soft X-ray region of the synchrotron beamline at the Taiwan Light Source was monitored using molecular ionization spectra at high resolution as energy references that correlate with the fine angular steps during grating rotation. The angular resolution of the scanning mechanism was <0.3 µrad, which results in an energy shift of 80 meV at 867 eV. The angular uncertainties caused by the lateral movement during a grating exchange were decreased from 2.2 µrad to 0.1 µrad after correction. The proposed method provides a simple solution for on-site beamline diagnostics of highly precise multi-axis optical manipulating instruments at synchrotron facilities and in-house laboratories.

Three-coordinate digital autocollimator

2013 ◽  
Vol 80 (12) ◽  
pp. 772 ◽  
Author(s):  
I. A. Konyakhin ◽  
T. V. Turgalieva
Keyword(s):  
Digital Autocollimator

X-Y digital autocollimator with 0.001″ resolution

2004 ◽  
Vol 47 (12) ◽  
pp. 1178-1183 ◽  
Author(s):  
A. N. Korolev ◽  
A. I. Gartsuev
Keyword(s):  
Digital Autocollimator
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