MEMS with fringing field: curvature-dependent electrostatic field and numerical techniques for recovering the membrane profile

2021 ◽  
Vol 40 (4) ◽  
Author(s):  
Mario Versaci ◽  
Paolo Di Barba ◽  
Francesco Carlo Morabito
Keyword(s):  
Electrostatic Field ◽  
Numerical Techniques ◽  
Field Curvature ◽  
Fringing Field

scholarly journals A 2D Membrane MEMS Device Model with Fringing Field: Curvature-Dependent Electrostatic Field and Optimal Control

Mathematics ◽  
2021 ◽  
Vol 9 (5) ◽  
pp. 465
Author(s):  
Paolo Di Barba ◽  
Luisa Fattorusso ◽  
Mario Versaci
Keyword(s):  
Optimal Control ◽  
Electrostatic Field ◽  
Circular Membrane ◽  
Differential Model ◽  
Field Curvature ◽  
Fringing Field ◽  
Uniqueness Of The Solution ◽  
Stable Equilibrium Position ◽  
The One ◽  
Fringing Field Effect

An important problem in membrane micro-electric-mechanical-system (MEMS) modeling is the fringing-field phenomenon, of which the main effect consists of force-line deformation of electrostatic field E near the edges of the plates, producing the anomalous deformation of the membrane when external voltage V is applied. In the framework of a 2D circular membrane MEMS, representing the fringing-field effect depending on |∇u|2 with the u profile of the membrane, and since strong E produces strong deformation of the membrane, we consider |E| proportional to the mean curvature of the membrane, obtaining a new nonlinear second-order differential model without explicit singularities. In this paper, the main purpose was the analytical study of this model, obtaining an algebraic condition ensuring the existence of at least one solution for it that depends on both the electromechanical properties of the material constituting the membrane and the positive parameter δ that weighs the terms |∇u|2. However, even if the the study of the model did not ensure the uniqueness of the solution, it made it possible to achieve the goal of finding a stable equilibrium position. Moreover, a range of admissible values of V were obtained in order, on the one hand, to win the mechanical inertia of the membrane and, on the other hand, to ensure that the membrane did not touch the upper disk of the device. Lastly, some optimal control conditions based on the variation of potential energy are presented and discussed.

Global Nonlinear Dynamics of MEMS Arches Actuated by Fringing-Field Electrostatic Field

2020 ◽  
Vol 45 (7) ◽  
pp. 5959-5975
Author(s):  
Mohammad Tausiff ◽  
Hassen M. Ouakad ◽  
Hussain Alqahtani
Keyword(s):  
Nonlinear Dynamics ◽  
Electrostatic Field ◽  
Fringing Field

A MAGNETOSTATIC CALCULATION OF FRINGING FIELD FOR THE ROGOWSKI POLE BOUNDARY WITH FLOATING SNAKE

1984 ◽  
Vol 45 (C1) ◽  
pp. C1-889-C1-892
Author(s):  
Yan Chen ◽  
Fan Ming-wu
Keyword(s):  
Fringing Field

Transient Response of Electrostatic Field due to Collision ESD between Spherical Electrodes by using Bare-chip Optical Electric Field Sensor

2020 ◽  
Vol 140 (12) ◽  
pp. 599-600
Author(s):  
Kento Kato ◽  
Ken Kawamata ◽  
Shinobu Ishigami ◽  
Ryuji Osawa ◽  
Takeshi Ishida ◽  
...  
Keyword(s):  
Electric Field ◽  
Transient Response ◽  
Electrostatic Field ◽  
Electric Field Sensor ◽  
Field Sensor

Electrostatic Field Distribution Measurement Using MEMS Micro-mirror Array

2014 ◽  
Vol 134 (12) ◽  
pp. 378-384 ◽  
Author(s):  
Toshihide Kuriyama ◽  
Wataru Takatsuji ◽  
Takaki Itoh ◽  
Hiroshi Maeda ◽  
Toshiyuki Nakaie ◽  
...  
Keyword(s):  
Field Distribution ◽  
Electrostatic Field ◽  
Distribution Measurement
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