Mechanisms of radiation induced cationic polymerization in the presence of onium salts

1995 ◽  
Vol 105 (1-4) ◽  
pp. 168-174 ◽  
Author(s):  
E. Malmström ◽  
P.E. Sundell ◽  
A. Hult ◽  
S.E. Jönsson
Keyword(s):  
Cationic Polymerization ◽  
Onium Salts ◽  
Radiation Induced

Effects of an Electron Acceptor on the Radiation-Induced Cationic Polymerization of α-Methylstyrene

1977 ◽  
Vol 10 (2) ◽  
pp. 266-268 ◽  
Author(s):  
Yukio Yamamoto ◽  
Akira Morinaka ◽  
Masahiro Irie ◽  
Koichiro Hayashi
Keyword(s):  
Electron Acceptor ◽  
Cationic Polymerization ◽  
Radiation Induced

Radiation-induced cationic polymerization of ethylene

1963 ◽  
Vol 1 (3) ◽  
pp. 1049-1053 ◽  
Author(s):  
Yoneho Tabata ◽  
Hiroshi Shibano ◽  
Hiroshi Sobue ◽  
Kiyoshi Hara
Keyword(s):  
Cationic Polymerization ◽  
Radiation Induced

Radiation-Induced Reactions of Onium Salts in Novolak

1995 ◽  
pp. 121-129
Author(s):  
Takahiro Kozawa ◽  
M. Uesaka ◽  
Takeo Watanabe ◽  
Yoshio Yamashita ◽  
H. Shibata ◽  
...  
Keyword(s):  
Onium Salts ◽  
Radiation Induced

Water-developable photoresists employing onium salt photoinitiators

1995 ◽  
Vol 7 (4) ◽  
pp. 503-515 ◽  
Author(s):  
Keith Davidson ◽  
Philip C Hadley
Keyword(s):  
Cationic Polymerization ◽  
Glycidyl Methacrylate ◽  
Radical Copolymerization ◽  
Water Soluble ◽  
Cross Linking ◽  
Aqueous Systems ◽  
Onium Salt ◽  
Water Dispersible ◽  
Onium Salts ◽  
Photoacid Generator

Aromatic onium salts are known compounds with well understood photoactivity. Their use as acid-generating species has, in the last few years, improved the performance of photoresists, particularly for microelectronics applications. There has, however, been little research dedicated to the use of these photoinitators in aqueousrdevelopable resists. This work investigates the feasibility of employing onium salts in the formulation of resists suitable for aqueous development. The ability of the onium salts to photoinitiate the cationic polymerization or cross-linking of epoxide residues was exploited using water-soluble or water-dispersible copolymers containing glycidyl methacrylate (GMA). The comonomers included N-vinyl pyrrolidinone (NVP), NN-dimethylacrylamide (DMAc) and 2-hydroxyethyI methacrylate (HEMA). Various copolymers were prepared by radical copolymerization to low conversion, typically in chloroform. Several onium salts were prepared by literature methods and their efficiency examined using a model copolymer. The photoacid generator (PAG) that performed best was then used in the examination of the aqueous systems.

Sign in / Sign up

Export Citation Format

Share Document