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Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer
Optik
◽
10.1016/j.ijleo.2007.12.014
◽
2009
◽
Vol 120
(11)
◽
pp. 553-557
◽
Cited By ~ 1
Author(s):
He Guotian
◽
Liao Changrong
◽
Jiang helun
◽
Yuangang Lu
◽
Huang Shanglian
Keyword(s):
Real Time
◽
Surface Profile
◽
Profile Measurement
◽
Feedback Type
◽
Sinusoidal Phase Modulating
◽
Surface Profile Measurement
Download Full-text
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References
Real-time two-dimensional surface profile measurement in a sinusoidal phase-modulating laser diode interferometer
Optical Engineering
◽
10.1117/12.173561
◽
1994
◽
Vol 33
(8)
◽
pp. 2754
◽
Cited By ~ 12
Author(s):
Takamasa Suzuki
Keyword(s):
Real Time
◽
Laser Diode
◽
Surface Profile
◽
Profile Measurement
◽
Two Dimensional
◽
Sinusoidal Phase Modulating
◽
Dimensional Surface
◽
Surface Profile Measurement
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Sinusoidal phase modulating interferometer for real-time surface profile measurement
10.1117/12.828715
◽
2009
◽
Author(s):
Xing-Wen Tan
◽
Guo-Tian He
Keyword(s):
Real Time
◽
Surface Profile
◽
Profile Measurement
◽
Sinusoidal Phase Modulating
◽
Surface Profile Measurement
Download Full-text
A new real-time surface profile measurement using a sinusoidal phase modulating interferometry
10.1117/12.725393
◽
2007
◽
Author(s):
Guotian He
◽
Xiangzhao Wang
◽
Dailin Li
◽
Jianmin Hu
Keyword(s):
Real Time
◽
Surface Profile
◽
Profile Measurement
◽
Sinusoidal Phase Modulating
◽
Surface Profile Measurement
Download Full-text
Accuracy and error analysis of real-time surface profile measurement with sinusoidal phase modulation interferometer
10.1117/12.828674
◽
2009
◽
Author(s):
Guotian He
◽
Helun Jiang
◽
Rongchang Liao
Keyword(s):
Error Analysis
◽
Real Time
◽
Phase Modulation
◽
Surface Profile
◽
Profile Measurement
◽
Surface Profile Measurement
Download Full-text
Sinusoidal phase modulating interferometry for surface profile measurement
Applied Optics
◽
10.1364/ao.25.003137
◽
1986
◽
Vol 25
(18)
◽
pp. 3137
◽
Cited By ~ 134
Author(s):
Osami Sasaki
◽
Hirokazu Okazaki
Keyword(s):
Surface Profile
◽
Profile Measurement
◽
Sinusoidal Phase Modulating
◽
Surface Profile Measurement
Download Full-text
Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement
Optical Engineering
◽
10.1117/1.2148447
◽
2005
◽
Vol 44
(12)
◽
pp. 125602
◽
Cited By ~ 5
Author(s):
Xuefeng Zhao
Keyword(s):
Laser Diode
◽
Machine Surface
◽
Surface Profile
◽
Profile Measurement
◽
Sinusoidal Phase Modulating
◽
Surface Profile Measurement
Download Full-text
Fiber-optic interferometer for surface profile measurement with vibration suppression
Optics Express
◽
10.1364/oe.19.004223
◽
2011
◽
Vol 19
(5)
◽
pp. 4223
Author(s):
Taekmin Kwon
◽
Seung-Woo Kim
Keyword(s):
Fiber Optic
◽
Vibration Suppression
◽
Surface Profile
◽
Profile Measurement
◽
Fiber Optic Interferometer
◽
Surface Profile Measurement
Download Full-text
Pre-correction of projected gratings for surface profile measurement
10.1117/12.839317
◽
2008
◽
Cited By ~ 1
Author(s):
Cuiru Sun
◽
Hua Lu
Keyword(s):
Surface Profile
◽
Profile Measurement
◽
Surface Profile Measurement
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Large surface profile measurement with instantaneous phase-shifting interferometry
Optical Engineering
◽
10.1117/1.1532331
◽
2003
◽
Vol 42
(2)
◽
pp. 367
◽
Cited By ~ 22
Author(s):
N. R. Sivakumar
Keyword(s):
Surface Profile
◽
Phase Shifting
◽
Profile Measurement
◽
Instantaneous Phase
◽
Phase Shifting Interferometry
◽
Surface Profile Measurement
Download Full-text
Light source with orthogonally linear polarized two‐frequency beam from laser diode and surface profile measurement
Optical Engineering
◽
10.1117/1.600714
◽
1996
◽
Vol 35
(4)
◽
pp. 1070
◽
Cited By ~ 6
Author(s):
Yukitoshi Otani
Keyword(s):
Light Source
◽
Laser Diode
◽
Surface Profile
◽
Profile Measurement
◽
Surface Profile Measurement
Download Full-text
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